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- W2164368032 abstract "This paper investigates manipulation tasks with arrays of microelectromechanical structures (MEMS). We develop a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe efficient algorithms for their evaluation. The theory of limit surfaces offers a purely geometric characterization of micro-scale contacts between actuator and moving object, which can be used to efficiently predict the motion of the object on an actuator array. We develop a theory of sensorless manipulation with microactuator arrays. It is shown how simple actuator control strategies can be used to uniquely align a part up to symmetry. These manipulation strategies can be computed efficiently and do not require sensor feedback. This theory is applicable to a wide range of microactuator arrays. Our actuators are oscillating structures of single-crystal silicon fabricated in a low-temperature SCREAM process. They exhibit high aspect ratios and high vertical stiffness, which is of great advantage for an effective implementation of our theory. Calculations show that arrays of these actuators can generate forces that are strong enough to levitate and move e.g. a piece of paper." @default.
- W2164368032 created "2016-06-24" @default.
- W2164368032 creator A5045399982 @default.
- W2164368032 creator A5046723017 @default.
- W2164368032 creator A5072153887 @default.
- W2164368032 creator A5078432849 @default.
- W2164368032 date "2002-12-17" @default.
- W2164368032 modified "2023-09-23" @default.
- W2164368032 title "A theory of manipulation and control for microfabricated actuator arrays" @default.
- W2164368032 cites W2018779124 @default.
- W2164368032 cites W2051570696 @default.
- W2164368032 cites W2060506423 @default.
- W2164368032 cites W2066967899 @default.
- W2164368032 cites W2098572589 @default.
- W2164368032 cites W2099864560 @default.
- W2164368032 cites W2137756992 @default.
- W2164368032 cites W2154235616 @default.
- W2164368032 cites W2161215354 @default.
- W2164368032 cites W2164067102 @default.
- W2164368032 cites W4206558109 @default.
- W2164368032 doi "https://doi.org/10.1109/memsys.1994.555606" @default.
- W2164368032 hasPublicationYear "2002" @default.
- W2164368032 type Work @default.
- W2164368032 sameAs 2164368032 @default.
- W2164368032 citedByCount "58" @default.
- W2164368032 countsByYear W21643680322012 @default.
- W2164368032 countsByYear W21643680322013 @default.
- W2164368032 countsByYear W21643680322017 @default.
- W2164368032 countsByYear W21643680322021 @default.
- W2164368032 countsByYear W21643680322022 @default.
- W2164368032 countsByYear W21643680322023 @default.
- W2164368032 crossrefType "proceedings-article" @default.
- W2164368032 hasAuthorship W2164368032A5045399982 @default.
- W2164368032 hasAuthorship W2164368032A5046723017 @default.
- W2164368032 hasAuthorship W2164368032A5072153887 @default.
- W2164368032 hasAuthorship W2164368032A5078432849 @default.
- W2164368032 hasBestOaLocation W21643680322 @default.
- W2164368032 hasConcept C127413603 @default.
- W2164368032 hasConcept C133731056 @default.
- W2164368032 hasConcept C145565327 @default.
- W2164368032 hasConcept C154945302 @default.
- W2164368032 hasConcept C16389437 @default.
- W2164368032 hasConcept C171250308 @default.
- W2164368032 hasConcept C172707124 @default.
- W2164368032 hasConcept C18788176 @default.
- W2164368032 hasConcept C192562407 @default.
- W2164368032 hasConcept C2775924081 @default.
- W2164368032 hasConcept C27838914 @default.
- W2164368032 hasConcept C37977207 @default.
- W2164368032 hasConcept C41008148 @default.
- W2164368032 hasConcept C47446073 @default.
- W2164368032 hasConcept C58373989 @default.
- W2164368032 hasConcept C78519656 @default.
- W2164368032 hasConcept C90509273 @default.
- W2164368032 hasConceptScore W2164368032C127413603 @default.
- W2164368032 hasConceptScore W2164368032C133731056 @default.
- W2164368032 hasConceptScore W2164368032C145565327 @default.
- W2164368032 hasConceptScore W2164368032C154945302 @default.
- W2164368032 hasConceptScore W2164368032C16389437 @default.
- W2164368032 hasConceptScore W2164368032C171250308 @default.
- W2164368032 hasConceptScore W2164368032C172707124 @default.
- W2164368032 hasConceptScore W2164368032C18788176 @default.
- W2164368032 hasConceptScore W2164368032C192562407 @default.
- W2164368032 hasConceptScore W2164368032C2775924081 @default.
- W2164368032 hasConceptScore W2164368032C27838914 @default.
- W2164368032 hasConceptScore W2164368032C37977207 @default.
- W2164368032 hasConceptScore W2164368032C41008148 @default.
- W2164368032 hasConceptScore W2164368032C47446073 @default.
- W2164368032 hasConceptScore W2164368032C58373989 @default.
- W2164368032 hasConceptScore W2164368032C78519656 @default.
- W2164368032 hasConceptScore W2164368032C90509273 @default.
- W2164368032 hasLocation W21643680321 @default.
- W2164368032 hasLocation W21643680322 @default.
- W2164368032 hasOpenAccess W2164368032 @default.
- W2164368032 hasPrimaryLocation W21643680321 @default.
- W2164368032 hasRelatedWork W1931795251 @default.
- W2164368032 hasRelatedWork W1996403770 @default.
- W2164368032 hasRelatedWork W2048789150 @default.
- W2164368032 hasRelatedWork W2095026267 @default.
- W2164368032 hasRelatedWork W2098314259 @default.
- W2164368032 hasRelatedWork W2126236248 @default.
- W2164368032 hasRelatedWork W3035481129 @default.
- W2164368032 hasRelatedWork W2072288634 @default.
- W2164368032 hasRelatedWork W2517184684 @default.
- W2164368032 hasRelatedWork W2550542890 @default.
- W2164368032 isParatext "false" @default.
- W2164368032 isRetracted "false" @default.
- W2164368032 magId "2164368032" @default.
- W2164368032 workType "article" @default.