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• W2164648202 abstract "A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA." @default.
• W2164648202 created "2016-06-24" @default.
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• W2164648202 date "2013-02-01" @default.
• W2164648202 modified "2023-10-17" @default.
• W2164648202 title "Micro position control of a 3-RRR compliant mechanism" @default.
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• W2164648202 doi "https://doi.org/10.1109/icit.2013.6505658" @default.
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