FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2164714475> ?p ?o ?g. }

• W2164714475 abstract "Back-end-of-line (BEOL) patterning defects on logic circuits are challenging to find and often involve lengthy wafer processing times and costly failure analysis resources to detect. A print-simulation tool was developed to predict patterning fails of such circuits. Validity of the simulator was verified independently through hardware data. Layout constructs of a functional logic circuit were simulated and potential weak spots that were susceptible to patterning fail were identified. Patterning solutions were put in place to address these fails. Independent test-structures were designed to electrically test for pattern fidelity of some of these constructs early in the process flow to provide faster feedback. Test results from these test-structures indicated that any potential gross patterning issues have been resolved for the identified design constructs before mask order. Yield learning methodologies like this significantly shortened the cycle of learning of the 22 nm BEOL process." @default.
• W2164714475 created "2016-06-24" @default.
• W2164714475 creator A5003959057 @default.
• W2164714475 creator A5006585147 @default.
• W2164714475 creator A5011231788 @default.
• W2164714475 creator A5017049724 @default.
• W2164714475 creator A5021350961 @default.
• W2164714475 creator A5039633278 @default.
• W2164714475 creator A5044011922 @default.
• W2164714475 creator A5045316315 @default.
• W2164714475 creator A5057345927 @default.
• W2164714475 creator A5063819904 @default.
• W2164714475 creator A5067418715 @default.
• W2164714475 creator A5073376249 @default.
• W2164714475 date "2010-07-01" @default.
• W2164714475 modified "2023-09-23" @default.
• W2164714475 title "Use of print-simulations in accelerated yield learning for 22nm BEOL technology" @default.
• W2164714475 cites W1686183427 @default.
• W2164714475 cites W1980367469 @default.
• W2164714475 cites W2005047684 @default.
• W2164714475 cites W2116501445 @default.
• W2164714475 cites W2119231224 @default.
• W2164714475 cites W2121129272 @default.
• W2164714475 cites W2137834578 @default.
• W2164714475 cites W2137835539 @default.
• W2164714475 doi "https://doi.org/10.1109/asmc.2010.5551469" @default.
• W2164714475 hasPublicationYear "2010" @default.
• W2164714475 type Work @default.
• W2164714475 sameAs 2164714475 @default.
• W2164714475 citedByCount "1" @default.
• W2164714475 crossrefType "proceedings-article" @default.
• W2164714475 hasAuthorship W2164714475A5003959057 @default.
• W2164714475 hasAuthorship W2164714475A5006585147 @default.
• W2164714475 hasAuthorship W2164714475A5011231788 @default.
• W2164714475 hasAuthorship W2164714475A5017049724 @default.
• W2164714475 hasAuthorship W2164714475A5021350961 @default.
• W2164714475 hasAuthorship W2164714475A5039633278 @default.
• W2164714475 hasAuthorship W2164714475A5044011922 @default.
• W2164714475 hasAuthorship W2164714475A5045316315 @default.
• W2164714475 hasAuthorship W2164714475A5057345927 @default.
• W2164714475 hasAuthorship W2164714475A5063819904 @default.
• W2164714475 hasAuthorship W2164714475A5067418715 @default.
• W2164714475 hasAuthorship W2164714475A5073376249 @default.
• W2164714475 hasConcept C111919701 @default.
• W2164714475 hasConcept C113364801 @default.
• W2164714475 hasConcept C113775141 @default.
• W2164714475 hasConcept C11413529 @default.
• W2164714475 hasConcept C119599485 @default.
• W2164714475 hasConcept C123745756 @default.
• W2164714475 hasConcept C127413603 @default.
• W2164714475 hasConcept C131017901 @default.
• W2164714475 hasConcept C134146338 @default.
• W2164714475 hasConcept C160671074 @default.
• W2164714475 hasConcept C171250308 @default.
• W2164714475 hasConcept C177409738 @default.
• W2164714475 hasConcept C192562407 @default.
• W2164714475 hasConcept C200601418 @default.
• W2164714475 hasConcept C24326235 @default.
• W2164714475 hasConcept C2776459999 @default.
• W2164714475 hasConcept C2776628375 @default.
• W2164714475 hasConcept C2779227376 @default.
• W2164714475 hasConcept C31258907 @default.
• W2164714475 hasConcept C41008148 @default.
• W2164714475 hasConcept C53524968 @default.
• W2164714475 hasConcept C64859876 @default.
• W2164714475 hasConcept C76155785 @default.
• W2164714475 hasConcept C98045186 @default.
• W2164714475 hasConceptScore W2164714475C111919701 @default.
• W2164714475 hasConceptScore W2164714475C113364801 @default.
• W2164714475 hasConceptScore W2164714475C113775141 @default.
• W2164714475 hasConceptScore W2164714475C11413529 @default.
• W2164714475 hasConceptScore W2164714475C119599485 @default.
• W2164714475 hasConceptScore W2164714475C123745756 @default.
• W2164714475 hasConceptScore W2164714475C127413603 @default.
• W2164714475 hasConceptScore W2164714475C131017901 @default.
• W2164714475 hasConceptScore W2164714475C134146338 @default.
• W2164714475 hasConceptScore W2164714475C160671074 @default.
• W2164714475 hasConceptScore W2164714475C171250308 @default.
• W2164714475 hasConceptScore W2164714475C177409738 @default.
• W2164714475 hasConceptScore W2164714475C192562407 @default.
• W2164714475 hasConceptScore W2164714475C200601418 @default.
• W2164714475 hasConceptScore W2164714475C24326235 @default.
• W2164714475 hasConceptScore W2164714475C2776459999 @default.
• W2164714475 hasConceptScore W2164714475C2776628375 @default.
• W2164714475 hasConceptScore W2164714475C2779227376 @default.
• W2164714475 hasConceptScore W2164714475C31258907 @default.
• W2164714475 hasConceptScore W2164714475C41008148 @default.
• W2164714475 hasConceptScore W2164714475C53524968 @default.
• W2164714475 hasConceptScore W2164714475C64859876 @default.
• W2164714475 hasConceptScore W2164714475C76155785 @default.
• W2164714475 hasConceptScore W2164714475C98045186 @default.
• W2164714475 hasLocation W21647144751 @default.
• W2164714475 hasOpenAccess W2164714475 @default.
• W2164714475 hasPrimaryLocation W21647144751 @default.
• W2164714475 hasRelatedWork W1484077763 @default.
• W2164714475 hasRelatedWork W2017572488 @default.
• W2164714475 hasRelatedWork W2159322492 @default.
• W2164714475 hasRelatedWork W2378174816 @default.
• W2164714475 hasRelatedWork W2944834075 @default.
• W2164714475 hasRelatedWork W3101094884 @default.

• next