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- W2164927763 abstract "Thc gcncral way for application of thc conform mapping method for the analysis the gconietrical cffccts in the four- tcrminal silicon prcssurc piezotransducer (FTSP transducer) is developed and presented in this paper. Various gcomctrical forms of the currcnt spread region (CSR) of the FTSP transducer arc analyzcd. As a result of this analysis, the analytical cquations for calcu- lation the clcmcnts of thc matrix of zi, resistanccs arc obtaincd and shown. Thesc cquations can be applied for the FTSP transducers whosc CSR is invariant both for rotation of 90 and for rotation of 180. Thc equations obtained and presented in this paper allows to calculate the geometrical correction function and the form coefficients of the FTSP transducer. In one's part, it allows to calculate thc sensitivity as well as the input and output resistances of the FTSP transducer as an clcnicnt of thc external clectrical circuit." @default.
- W2164927763 created "2016-06-24" @default.
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- W2164927763 date "2002-01-01" @default.
- W2164927763 modified "2023-09-25" @default.
- W2164927763 title "An aplication of conform mapping to the calculation of FTSP transducer with various geometrical form" @default.
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- W2164927763 doi "https://doi.org/10.1109/sredm.2002.1024306" @default.
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