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- W2164966987 endingPage "110" @default.
- W2164966987 startingPage "105" @default.
- W2164966987 abstract "Rapid thermal diffusion (RTD) of P and/or B into silicon wafer from spin-on sources using tungsten halogen lamps was successfully used to fabricate very shallow n/sup +/-p and/or p/sup +/-n junctions. RTD was performed in the temperature range of 600-1080 degrees C for 5-60 s, and the heating rates were varied in the range 10-83 degrees C/s. Effects of the two-step RTD, high temperature for several seconds, and subsequent low temperature for 60 s, were also examined. The RTD of P was carried out from P-doped oxide films and that of B was carried out from polymeric boron-doped films. Using RTD one can obtain a very shallow junction, thinner than 20 nm in depth. The impurity diffusion by RTD is similar to conventional furnace processing. However, the RTD of P and/for B was enhanced with the heating rate, especially at 83 degrees C/s. This was assumed to be caused by the stress field induced in the heating stage. The junction depth, I-V characteristics, spectral response, and cell parameters of fabricated photodiodes are presented.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2164966987 created "2016-06-24" @default.
- W2164966987 creator A5001377768 @default.
- W2164966987 creator A5040813358 @default.
- W2164966987 creator A5048756005 @default.
- W2164966987 creator A5076863082 @default.
- W2164966987 date "1992-01-01" @default.
- W2164966987 modified "2023-10-09" @default.
- W2164966987 title "Shallow-junction formation on silicon by rapid thermal diffusion of impurities from a spin-on source" @default.
- W2164966987 cites W1964919084 @default.
- W2164966987 cites W1969987649 @default.
- W2164966987 cites W2027234646 @default.
- W2164966987 cites W2031275670 @default.
- W2164966987 cites W2059824139 @default.
- W2164966987 cites W2072810712 @default.
- W2164966987 cites W2106155751 @default.
- W2164966987 cites W2116034266 @default.
- W2164966987 cites W2156358924 @default.
- W2164966987 cites W2296949338 @default.
- W2164966987 cites W2463539645 @default.
- W2164966987 doi "https://doi.org/10.1109/16.108218" @default.
- W2164966987 hasPublicationYear "1992" @default.
- W2164966987 type Work @default.
- W2164966987 sameAs 2164966987 @default.
- W2164966987 citedByCount "50" @default.
- W2164966987 countsByYear W21649669872012 @default.
- W2164966987 countsByYear W21649669872013 @default.
- W2164966987 countsByYear W21649669872015 @default.
- W2164966987 countsByYear W21649669872017 @default.
- W2164966987 countsByYear W21649669872018 @default.
- W2164966987 crossrefType "journal-article" @default.
- W2164966987 hasAuthorship W2164966987A5001377768 @default.
- W2164966987 hasAuthorship W2164966987A5040813358 @default.
- W2164966987 hasAuthorship W2164966987A5048756005 @default.
- W2164966987 hasAuthorship W2164966987A5076863082 @default.
- W2164966987 hasConcept C108225325 @default.
- W2164966987 hasConcept C113196181 @default.
- W2164966987 hasConcept C121332964 @default.
- W2164966987 hasConcept C160671074 @default.
- W2164966987 hasConcept C178790620 @default.
- W2164966987 hasConcept C185592680 @default.
- W2164966987 hasConcept C191897082 @default.
- W2164966987 hasConcept C192562407 @default.
- W2164966987 hasConcept C39353612 @default.
- W2164966987 hasConcept C49040817 @default.
- W2164966987 hasConcept C501308230 @default.
- W2164966987 hasConcept C542268612 @default.
- W2164966987 hasConcept C544956773 @default.
- W2164966987 hasConcept C57863236 @default.
- W2164966987 hasConcept C62628764 @default.
- W2164966987 hasConcept C69357855 @default.
- W2164966987 hasConcept C71987851 @default.
- W2164966987 hasConcept C72832162 @default.
- W2164966987 hasConcept C97355855 @default.
- W2164966987 hasConceptScore W2164966987C108225325 @default.
- W2164966987 hasConceptScore W2164966987C113196181 @default.
- W2164966987 hasConceptScore W2164966987C121332964 @default.
- W2164966987 hasConceptScore W2164966987C160671074 @default.
- W2164966987 hasConceptScore W2164966987C178790620 @default.
- W2164966987 hasConceptScore W2164966987C185592680 @default.
- W2164966987 hasConceptScore W2164966987C191897082 @default.
- W2164966987 hasConceptScore W2164966987C192562407 @default.
- W2164966987 hasConceptScore W2164966987C39353612 @default.
- W2164966987 hasConceptScore W2164966987C49040817 @default.
- W2164966987 hasConceptScore W2164966987C501308230 @default.
- W2164966987 hasConceptScore W2164966987C542268612 @default.
- W2164966987 hasConceptScore W2164966987C544956773 @default.
- W2164966987 hasConceptScore W2164966987C57863236 @default.
- W2164966987 hasConceptScore W2164966987C62628764 @default.
- W2164966987 hasConceptScore W2164966987C69357855 @default.
- W2164966987 hasConceptScore W2164966987C71987851 @default.
- W2164966987 hasConceptScore W2164966987C72832162 @default.
- W2164966987 hasConceptScore W2164966987C97355855 @default.
- W2164966987 hasIssue "1" @default.
- W2164966987 hasLocation W21649669871 @default.
- W2164966987 hasOpenAccess W2164966987 @default.
- W2164966987 hasPrimaryLocation W21649669871 @default.
- W2164966987 hasRelatedWork W1984395419 @default.
- W2164966987 hasRelatedWork W1991489478 @default.
- W2164966987 hasRelatedWork W1992994236 @default.
- W2164966987 hasRelatedWork W2011715521 @default.
- W2164966987 hasRelatedWork W2043847290 @default.
- W2164966987 hasRelatedWork W2048527162 @default.
- W2164966987 hasRelatedWork W2063777331 @default.
- W2164966987 hasRelatedWork W2076271866 @default.
- W2164966987 hasRelatedWork W2099983347 @default.
- W2164966987 hasRelatedWork W2115248866 @default.
- W2164966987 hasVolume "39" @default.
- W2164966987 isParatext "false" @default.
- W2164966987 isRetracted "false" @default.
- W2164966987 magId "2164966987" @default.
- W2164966987 workType "article" @default.