Matches in SemOpenAlex for { <https://semopenalex.org/work/W2164987771> ?p ?o ?g. }
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- W2164987771 endingPage "043013" @default.
- W2164987771 startingPage "043013" @default.
- W2164987771 abstract "In surface micromachined structures, many parameters like geometry and Young's modulus depend on the process steps and need to be measured for accurate prediction of their functionality. This work discusses simple electrical measurement techniques on surface micromachined cantilever beams to determine Young's modulus, the gap between the beam and the substrate, and the thickness of a deposited aluminum layer on the beam. Cantilevers are ubiquitous in most microelectromechanical system (MEMS) sensors and actuators, and hence are ideal test structures. Pull-in, and a novel resonance frequency measurement based on the pull-in technique, are done on oxide anchored doped polysilicon beams at the wafer level, and some of the device and material properties are extracted from these measurements. The extracted values are compared with those determined from established methods like vibrometry and surface profiler measurements, and show good agreement. Since the measurements are all electrical, they can be part of standardized testing and are also suitable for packaged devices." @default.
- W2164987771 created "2016-06-24" @default.
- W2164987771 creator A5016502376 @default.
- W2164987771 creator A5060448117 @default.
- W2164987771 date "2007-10-01" @default.
- W2164987771 modified "2023-10-16" @default.
- W2164987771 title "Parameter extraction from simple electrical measurements on surface micromachined cantilevers" @default.
- W2164987771 cites W1963590099 @default.
- W2164987771 cites W1964225422 @default.
- W2164987771 cites W1968416806 @default.
- W2164987771 cites W1976780495 @default.
- W2164987771 cites W1982191975 @default.
- W2164987771 cites W1988740729 @default.
- W2164987771 cites W2056826402 @default.
- W2164987771 cites W2065032851 @default.
- W2164987771 cites W2065139610 @default.
- W2164987771 cites W2065745205 @default.
- W2164987771 cites W2077125422 @default.
- W2164987771 cites W2081681582 @default.
- W2164987771 cites W2087740116 @default.
- W2164987771 cites W2105907817 @default.
- W2164987771 cites W2116357047 @default.
- W2164987771 cites W2148648899 @default.
- W2164987771 cites W2154183381 @default.
- W2164987771 doi "https://doi.org/10.1117/1.2794291" @default.
- W2164987771 hasPublicationYear "2007" @default.
- W2164987771 type Work @default.
- W2164987771 sameAs 2164987771 @default.
- W2164987771 citedByCount "14" @default.
- W2164987771 countsByYear W21649877712013 @default.
- W2164987771 countsByYear W21649877712014 @default.
- W2164987771 countsByYear W21649877712015 @default.
- W2164987771 countsByYear W21649877712017 @default.
- W2164987771 countsByYear W21649877712020 @default.
- W2164987771 countsByYear W21649877712021 @default.
- W2164987771 crossrefType "journal-article" @default.
- W2164987771 hasAuthorship W2164987771A5016502376 @default.
- W2164987771 hasAuthorship W2164987771A5060448117 @default.
- W2164987771 hasConcept C111368507 @default.
- W2164987771 hasConcept C120665830 @default.
- W2164987771 hasConcept C121332964 @default.
- W2164987771 hasConcept C127313418 @default.
- W2164987771 hasConcept C127413603 @default.
- W2164987771 hasConcept C136525101 @default.
- W2164987771 hasConcept C141354745 @default.
- W2164987771 hasConcept C142724271 @default.
- W2164987771 hasConcept C145667562 @default.
- W2164987771 hasConcept C159985019 @default.
- W2164987771 hasConcept C160671074 @default.
- W2164987771 hasConcept C168834538 @default.
- W2164987771 hasConcept C192562407 @default.
- W2164987771 hasConcept C204787440 @default.
- W2164987771 hasConcept C24326235 @default.
- W2164987771 hasConcept C24890656 @default.
- W2164987771 hasConcept C2777289219 @default.
- W2164987771 hasConcept C37977207 @default.
- W2164987771 hasConcept C49040817 @default.
- W2164987771 hasConcept C71924100 @default.
- W2164987771 hasConceptScore W2164987771C111368507 @default.
- W2164987771 hasConceptScore W2164987771C120665830 @default.
- W2164987771 hasConceptScore W2164987771C121332964 @default.
- W2164987771 hasConceptScore W2164987771C127313418 @default.
- W2164987771 hasConceptScore W2164987771C127413603 @default.
- W2164987771 hasConceptScore W2164987771C136525101 @default.
- W2164987771 hasConceptScore W2164987771C141354745 @default.
- W2164987771 hasConceptScore W2164987771C142724271 @default.
- W2164987771 hasConceptScore W2164987771C145667562 @default.
- W2164987771 hasConceptScore W2164987771C159985019 @default.
- W2164987771 hasConceptScore W2164987771C160671074 @default.
- W2164987771 hasConceptScore W2164987771C168834538 @default.
- W2164987771 hasConceptScore W2164987771C192562407 @default.
- W2164987771 hasConceptScore W2164987771C204787440 @default.
- W2164987771 hasConceptScore W2164987771C24326235 @default.
- W2164987771 hasConceptScore W2164987771C24890656 @default.
- W2164987771 hasConceptScore W2164987771C2777289219 @default.
- W2164987771 hasConceptScore W2164987771C37977207 @default.
- W2164987771 hasConceptScore W2164987771C49040817 @default.
- W2164987771 hasConceptScore W2164987771C71924100 @default.
- W2164987771 hasIssue "4" @default.
- W2164987771 hasLocation W21649877711 @default.
- W2164987771 hasOpenAccess W2164987771 @default.
- W2164987771 hasPrimaryLocation W21649877711 @default.
- W2164987771 hasRelatedWork W1968968791 @default.
- W2164987771 hasRelatedWork W1981865689 @default.
- W2164987771 hasRelatedWork W2036827423 @default.
- W2164987771 hasRelatedWork W2102127257 @default.
- W2164987771 hasRelatedWork W2116745056 @default.
- W2164987771 hasRelatedWork W2122105968 @default.
- W2164987771 hasRelatedWork W2164267218 @default.
- W2164987771 hasRelatedWork W2347220601 @default.
- W2164987771 hasRelatedWork W2387162125 @default.
- W2164987771 hasRelatedWork W2502533289 @default.
- W2164987771 hasVolume "6" @default.
- W2164987771 isParatext "false" @default.
- W2164987771 isRetracted "false" @default.
- W2164987771 magId "2164987771" @default.
- W2164987771 workType "article" @default.