Matches in SemOpenAlex for { <https://semopenalex.org/work/W2165004162> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2165004162 endingPage "2303" @default.
- W2165004162 startingPage "2294" @default.
- W2165004162 abstract "The sharply pointed tip of the emitter is the only physical structure in typical field emission vacuum microelectronic devices that is not commonly produced by standard integrated circuit fabrication processes. The authors suggest the use of a cusp which naturally forms when a hole is filled with a conformal film, as a mold to create the sharply pointed emitter. Not only is this tip formation method easily integrated with standard semiconductor processes to produce cathodes, diodes, triodes, and higher number electrode devices, but it is also self-aligned to all of the electrodes within the device structure. The authors describe the basic process sequence used to create a microtriode device and then show how the process can be altered to produce different numbers of electrodes and freestanding cathode structures. Preliminary experimental results are described and estimates of process reproducibility are analyzed and discussed.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2165004162 created "2016-06-24" @default.
- W2165004162 creator A5000519467 @default.
- W2165004162 creator A5018601737 @default.
- W2165004162 date "1991-01-01" @default.
- W2165004162 modified "2023-09-23" @default.
- W2165004162 title "A fabrication method for the integration of vacuum microelectronic devices" @default.
- W2165004162 cites W1596699902 @default.
- W2165004162 cites W1972033875 @default.
- W2165004162 cites W1999512045 @default.
- W2165004162 cites W2037607487 @default.
- W2165004162 cites W2038836398 @default.
- W2165004162 cites W2057938486 @default.
- W2165004162 cites W2160454840 @default.
- W2165004162 cites W2536784020 @default.
- W2165004162 cites W2536953445 @default.
- W2165004162 cites W2330903728 @default.
- W2165004162 doi "https://doi.org/10.1109/16.88513" @default.
- W2165004162 hasPublicationYear "1991" @default.
- W2165004162 type Work @default.
- W2165004162 sameAs 2165004162 @default.
- W2165004162 citedByCount "15" @default.
- W2165004162 crossrefType "journal-article" @default.
- W2165004162 hasAuthorship W2165004162A5000519467 @default.
- W2165004162 hasAuthorship W2165004162A5018601737 @default.
- W2165004162 hasConcept C111919701 @default.
- W2165004162 hasConcept C119599485 @default.
- W2165004162 hasConcept C121332964 @default.
- W2165004162 hasConcept C123544296 @default.
- W2165004162 hasConcept C127413603 @default.
- W2165004162 hasConcept C134406635 @default.
- W2165004162 hasConcept C136525101 @default.
- W2165004162 hasConcept C142724271 @default.
- W2165004162 hasConcept C165801399 @default.
- W2165004162 hasConcept C171250308 @default.
- W2165004162 hasConcept C17525397 @default.
- W2165004162 hasConcept C187937830 @default.
- W2165004162 hasConcept C192562407 @default.
- W2165004162 hasConcept C204787440 @default.
- W2165004162 hasConcept C2779227376 @default.
- W2165004162 hasConcept C41008148 @default.
- W2165004162 hasConcept C46918542 @default.
- W2165004162 hasConcept C49040817 @default.
- W2165004162 hasConcept C49110097 @default.
- W2165004162 hasConcept C52192207 @default.
- W2165004162 hasConcept C530198007 @default.
- W2165004162 hasConcept C62520636 @default.
- W2165004162 hasConcept C71924100 @default.
- W2165004162 hasConcept C78434282 @default.
- W2165004162 hasConcept C98045186 @default.
- W2165004162 hasConceptScore W2165004162C111919701 @default.
- W2165004162 hasConceptScore W2165004162C119599485 @default.
- W2165004162 hasConceptScore W2165004162C121332964 @default.
- W2165004162 hasConceptScore W2165004162C123544296 @default.
- W2165004162 hasConceptScore W2165004162C127413603 @default.
- W2165004162 hasConceptScore W2165004162C134406635 @default.
- W2165004162 hasConceptScore W2165004162C136525101 @default.
- W2165004162 hasConceptScore W2165004162C142724271 @default.
- W2165004162 hasConceptScore W2165004162C165801399 @default.
- W2165004162 hasConceptScore W2165004162C171250308 @default.
- W2165004162 hasConceptScore W2165004162C17525397 @default.
- W2165004162 hasConceptScore W2165004162C187937830 @default.
- W2165004162 hasConceptScore W2165004162C192562407 @default.
- W2165004162 hasConceptScore W2165004162C204787440 @default.
- W2165004162 hasConceptScore W2165004162C2779227376 @default.
- W2165004162 hasConceptScore W2165004162C41008148 @default.
- W2165004162 hasConceptScore W2165004162C46918542 @default.
- W2165004162 hasConceptScore W2165004162C49040817 @default.
- W2165004162 hasConceptScore W2165004162C49110097 @default.
- W2165004162 hasConceptScore W2165004162C52192207 @default.
- W2165004162 hasConceptScore W2165004162C530198007 @default.
- W2165004162 hasConceptScore W2165004162C62520636 @default.
- W2165004162 hasConceptScore W2165004162C71924100 @default.
- W2165004162 hasConceptScore W2165004162C78434282 @default.
- W2165004162 hasConceptScore W2165004162C98045186 @default.
- W2165004162 hasIssue "10" @default.
- W2165004162 hasLocation W21650041621 @default.
- W2165004162 hasOpenAccess W2165004162 @default.
- W2165004162 hasPrimaryLocation W21650041621 @default.
- W2165004162 hasRelatedWork W2003288660 @default.
- W2165004162 hasRelatedWork W2058273739 @default.
- W2165004162 hasRelatedWork W2073482823 @default.
- W2165004162 hasRelatedWork W2147926655 @default.
- W2165004162 hasRelatedWork W2165004162 @default.
- W2165004162 hasRelatedWork W2251646552 @default.
- W2165004162 hasRelatedWork W2252425423 @default.
- W2165004162 hasRelatedWork W2483518727 @default.
- W2165004162 hasRelatedWork W272362294 @default.
- W2165004162 hasRelatedWork W1659379356 @default.
- W2165004162 hasVolume "38" @default.
- W2165004162 isParatext "false" @default.
- W2165004162 isRetracted "false" @default.
- W2165004162 magId "2165004162" @default.
- W2165004162 workType "article" @default.