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• W2165200441 abstract "We present the first electrochemical actuator with Parylene bellows for large-deflection operation. The bellows diaphragm was fabricated using a polyethylene-glycol-based sacrificial molding technique followed by coating in Parylene C. Bellows were mechanically characterized and integrated with a pair of interdigitated electrodes to form an electrochemical actuator that is suitable for low-power pumping of fluids. Pump performance (gas generation rate and pump efficiency) was optimized through a careful examination of geometrical factors. Overall, a maximum pump efficiency of 90% was achieved in the case of electroplated electrodes, and a deflection of over 1.5 mm was demonstrated. Real-time wireless operation was achieved. The complete fabrication process and the materials used in this actuator are bio-compatible, which makes it suitable for biological and medical applications." @default.
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• W2165200441 date "2010-02-01" @default.
• W2165200441 modified "2023-10-07" @default.
• W2165200441 title "A Parylene Bellows Electrochemical Actuator" @default.
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• W2165200441 doi "https://doi.org/10.1109/jmems.2009.2032670" @default.
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