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- W2165251415 abstract "This paper describes a temperature compensated film bulk acoustic resonator (FBAR) with temperature coefficient of resonant frequency (TCF) of -0.45 ppm//spl deg/C (between 85 and 110/spl deg/C) at 4.4 GHz. The FBAR is composed of Al/ZnO/Al/SiO/sub 2/ on a surface micromachined cantilever that is released by XeF/sub 2/ vapor etching. Residual stress and material temperature parameters have been incorporated into simulations for optimal design of a temperature compensated FBAR." @default.
- W2165251415 created "2016-06-24" @default.
- W2165251415 creator A5046110835 @default.
- W2165251415 creator A5049341927 @default.
- W2165251415 creator A5053597658 @default.
- W2165251415 creator A5079731588 @default.
- W2165251415 date "2005-07-06" @default.
- W2165251415 modified "2023-09-24" @default.
- W2165251415 title "Film bulk acoustic resonator at 4.4 grz with ultra low temperature coefficient of resonant frequency" @default.
- W2165251415 cites W1761263056 @default.
- W2165251415 cites W1963644382 @default.
- W2165251415 cites W2043313417 @default.
- W2165251415 cites W2058086719 @default.
- W2165251415 cites W2115170471 @default.
- W2165251415 doi "https://doi.org/10.1109/memsys.2005.1453859" @default.
- W2165251415 hasPublicationYear "2005" @default.
- W2165251415 type Work @default.
- W2165251415 sameAs 2165251415 @default.
- W2165251415 citedByCount "8" @default.
- W2165251415 countsByYear W21652514152012 @default.
- W2165251415 countsByYear W21652514152013 @default.
- W2165251415 countsByYear W21652514152015 @default.
- W2165251415 crossrefType "proceedings-article" @default.
- W2165251415 hasAuthorship W2165251415A5046110835 @default.
- W2165251415 hasAuthorship W2165251415A5049341927 @default.
- W2165251415 hasAuthorship W2165251415A5053597658 @default.
- W2165251415 hasAuthorship W2165251415A5079731588 @default.
- W2165251415 hasConcept C100460472 @default.
- W2165251415 hasConcept C121332964 @default.
- W2165251415 hasConcept C141354745 @default.
- W2165251415 hasConcept C159985019 @default.
- W2165251415 hasConcept C16643434 @default.
- W2165251415 hasConcept C192562407 @default.
- W2165251415 hasConcept C2779227376 @default.
- W2165251415 hasConcept C37292000 @default.
- W2165251415 hasConcept C49040817 @default.
- W2165251415 hasConcept C62520636 @default.
- W2165251415 hasConcept C72293138 @default.
- W2165251415 hasConcept C97126364 @default.
- W2165251415 hasConceptScore W2165251415C100460472 @default.
- W2165251415 hasConceptScore W2165251415C121332964 @default.
- W2165251415 hasConceptScore W2165251415C141354745 @default.
- W2165251415 hasConceptScore W2165251415C159985019 @default.
- W2165251415 hasConceptScore W2165251415C16643434 @default.
- W2165251415 hasConceptScore W2165251415C192562407 @default.
- W2165251415 hasConceptScore W2165251415C2779227376 @default.
- W2165251415 hasConceptScore W2165251415C37292000 @default.
- W2165251415 hasConceptScore W2165251415C49040817 @default.
- W2165251415 hasConceptScore W2165251415C62520636 @default.
- W2165251415 hasConceptScore W2165251415C72293138 @default.
- W2165251415 hasConceptScore W2165251415C97126364 @default.
- W2165251415 hasLocation W21652514151 @default.
- W2165251415 hasOpenAccess W2165251415 @default.
- W2165251415 hasPrimaryLocation W21652514151 @default.
- W2165251415 hasRelatedWork W1523558574 @default.
- W2165251415 hasRelatedWork W1535200054 @default.
- W2165251415 hasRelatedWork W1551474150 @default.
- W2165251415 hasRelatedWork W1761263056 @default.
- W2165251415 hasRelatedWork W1934334701 @default.
- W2165251415 hasRelatedWork W1938813085 @default.
- W2165251415 hasRelatedWork W1977578895 @default.
- W2165251415 hasRelatedWork W1978343492 @default.
- W2165251415 hasRelatedWork W1997316729 @default.
- W2165251415 hasRelatedWork W2021538654 @default.
- W2165251415 hasRelatedWork W2032692003 @default.
- W2165251415 hasRelatedWork W2051770880 @default.
- W2165251415 hasRelatedWork W2108048737 @default.
- W2165251415 hasRelatedWork W2132603972 @default.
- W2165251415 hasRelatedWork W2152579453 @default.
- W2165251415 hasRelatedWork W2384652527 @default.
- W2165251415 hasRelatedWork W2547958412 @default.
- W2165251415 hasRelatedWork W2556755235 @default.
- W2165251415 hasRelatedWork W3137810729 @default.
- W2165251415 hasRelatedWork W2185707120 @default.
- W2165251415 isParatext "false" @default.
- W2165251415 isRetracted "false" @default.
- W2165251415 magId "2165251415" @default.
- W2165251415 workType "article" @default.