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- W2165345335 abstract "The properties of mechanically and electrically processed silicon surfaces were evaluated by atomic force microscopy (AFM). Silicon specimens were processed using an electrically conductive diamond tip with and without vibration. After the electrical processing, protuberances were generated and the electric current through the silicon surface decreased because of local anodic oxidation. Grooves were formed by mechanical processing without vibration, and the electric current increased. In contrast, mechanical processing with vibration caused the surface to protuberate and the electrical resistance increased similar to that observed for electrical processing. With sequential processing, the local oxide layer formed by electrical processing can be removed by mechanical processing using the same tip without vibration. Although the electrical resistance is decreased by the mechanical processing without vibration, additional electrical processing on the mechanically processed area further increases the electrical resistance of the surface." @default.
- W2165345335 created "2016-06-24" @default.
- W2165345335 creator A5015992381 @default.
- W2165345335 creator A5064695514 @default.
- W2165345335 date "2014-08-31" @default.
- W2165345335 modified "2023-10-14" @default.
- W2165345335 title "Repeatable change in electrical resistance of Si surface by mechanical and electrical nanoprocessing" @default.
- W2165345335 cites W1965702561 @default.
- W2165345335 cites W1966947382 @default.
- W2165345335 cites W1970588492 @default.
- W2165345335 cites W1975825863 @default.
- W2165345335 cites W1991079120 @default.
- W2165345335 cites W2015136561 @default.
- W2165345335 cites W2022162151 @default.
- W2165345335 cites W2023841449 @default.
- W2165345335 cites W2026989205 @default.
- W2165345335 cites W2031066392 @default.
- W2165345335 cites W2040113820 @default.
- W2165345335 cites W2052731950 @default.
- W2165345335 cites W2075315245 @default.
- W2165345335 cites W2085488085 @default.
- W2165345335 cites W2101974275 @default.
- W2165345335 cites W2105810885 @default.
- W2165345335 cites W2170709447 @default.
- W2165345335 cites W2319451006 @default.
- W2165345335 cites W2334180416 @default.
- W2165345335 cites W293929578 @default.
- W2165345335 doi "https://doi.org/10.1186/1556-276x-9-455" @default.
- W2165345335 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/4256973" @default.
- W2165345335 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25489276" @default.
- W2165345335 hasPublicationYear "2014" @default.
- W2165345335 type Work @default.
- W2165345335 sameAs 2165345335 @default.
- W2165345335 citedByCount "0" @default.
- W2165345335 crossrefType "journal-article" @default.
- W2165345335 hasAuthorship W2165345335A5015992381 @default.
- W2165345335 hasAuthorship W2165345335A5064695514 @default.
- W2165345335 hasBestOaLocation W21653453351 @default.
- W2165345335 hasConcept C119599485 @default.
- W2165345335 hasConcept C121332964 @default.
- W2165345335 hasConcept C127413603 @default.
- W2165345335 hasConcept C132235601 @default.
- W2165345335 hasConcept C159985019 @default.
- W2165345335 hasConcept C171250308 @default.
- W2165345335 hasConcept C180238147 @default.
- W2165345335 hasConcept C192562407 @default.
- W2165345335 hasConcept C198394728 @default.
- W2165345335 hasConcept C202374169 @default.
- W2165345335 hasConcept C24890656 @default.
- W2165345335 hasConcept C2779227376 @default.
- W2165345335 hasConcept C2988004515 @default.
- W2165345335 hasConcept C49040817 @default.
- W2165345335 hasConcept C544956773 @default.
- W2165345335 hasConcept C66825105 @default.
- W2165345335 hasConcept C94857076 @default.
- W2165345335 hasConceptScore W2165345335C119599485 @default.
- W2165345335 hasConceptScore W2165345335C121332964 @default.
- W2165345335 hasConceptScore W2165345335C127413603 @default.
- W2165345335 hasConceptScore W2165345335C132235601 @default.
- W2165345335 hasConceptScore W2165345335C159985019 @default.
- W2165345335 hasConceptScore W2165345335C171250308 @default.
- W2165345335 hasConceptScore W2165345335C180238147 @default.
- W2165345335 hasConceptScore W2165345335C192562407 @default.
- W2165345335 hasConceptScore W2165345335C198394728 @default.
- W2165345335 hasConceptScore W2165345335C202374169 @default.
- W2165345335 hasConceptScore W2165345335C24890656 @default.
- W2165345335 hasConceptScore W2165345335C2779227376 @default.
- W2165345335 hasConceptScore W2165345335C2988004515 @default.
- W2165345335 hasConceptScore W2165345335C49040817 @default.
- W2165345335 hasConceptScore W2165345335C544956773 @default.
- W2165345335 hasConceptScore W2165345335C66825105 @default.
- W2165345335 hasConceptScore W2165345335C94857076 @default.
- W2165345335 hasIssue "1" @default.
- W2165345335 hasLocation W21653453351 @default.
- W2165345335 hasLocation W21653453352 @default.
- W2165345335 hasLocation W21653453353 @default.
- W2165345335 hasLocation W21653453354 @default.
- W2165345335 hasOpenAccess W2165345335 @default.
- W2165345335 hasPrimaryLocation W21653453351 @default.
- W2165345335 hasRelatedWork W1566693841 @default.
- W2165345335 hasRelatedWork W2047111024 @default.
- W2165345335 hasRelatedWork W2084985396 @default.
- W2165345335 hasRelatedWork W2159203673 @default.
- W2165345335 hasRelatedWork W2161622561 @default.
- W2165345335 hasRelatedWork W2165345335 @default.
- W2165345335 hasRelatedWork W2165522438 @default.
- W2165345335 hasRelatedWork W2168702377 @default.
- W2165345335 hasRelatedWork W2220606361 @default.
- W2165345335 hasRelatedWork W3091946041 @default.
- W2165345335 hasVolume "9" @default.
- W2165345335 isParatext "false" @default.
- W2165345335 isRetracted "false" @default.
- W2165345335 magId "2165345335" @default.
- W2165345335 workType "article" @default.