Matches in SemOpenAlex for { <https://semopenalex.org/work/W2165422160> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2165422160 abstract "We report a method to etch multiple quartz crystal resonators in parallel to accuracy better than +/-50 ppm by measuring the sample resonant frequency with a network analyzer while the sample is wet etched. The etch rate of individual resonators is fine tuned with electrical bias to compensate local etch rate and wafer thickness variations. This allows for the final frequency of the resonators across the wafer to be within the required specifications without trimming. By eliminating the need for the final sample trimming, the manufacturing cost can be lowered and further resonator miniaturization is feasible." @default.
- W2165422160 created "2016-06-24" @default.
- W2165422160 creator A5014987755 @default.
- W2165422160 creator A5018761973 @default.
- W2165422160 creator A5043024509 @default.
- W2165422160 creator A5085012746 @default.
- W2165422160 date "2009-04-01" @default.
- W2165422160 modified "2023-09-23" @default.
- W2165422160 title "Electrical control for wet etching of quartz resonators" @default.
- W2165422160 cites W2108062947 @default.
- W2165422160 cites W2115413123 @default.
- W2165422160 cites W2140467139 @default.
- W2165422160 cites W2159793528 @default.
- W2165422160 doi "https://doi.org/10.1109/freq.2009.5168327" @default.
- W2165422160 hasPublicationYear "2009" @default.
- W2165422160 type Work @default.
- W2165422160 sameAs 2165422160 @default.
- W2165422160 citedByCount "2" @default.
- W2165422160 countsByYear W21654221602018 @default.
- W2165422160 countsByYear W21654221602022 @default.
- W2165422160 crossrefType "proceedings-article" @default.
- W2165422160 hasAuthorship W2165422160A5014987755 @default.
- W2165422160 hasAuthorship W2165422160A5018761973 @default.
- W2165422160 hasAuthorship W2165422160A5043024509 @default.
- W2165422160 hasAuthorship W2165422160A5085012746 @default.
- W2165422160 hasConcept C100460472 @default.
- W2165422160 hasConcept C119599485 @default.
- W2165422160 hasConcept C121332964 @default.
- W2165422160 hasConcept C127413603 @default.
- W2165422160 hasConcept C159985019 @default.
- W2165422160 hasConcept C160671074 @default.
- W2165422160 hasConcept C171250308 @default.
- W2165422160 hasConcept C192562407 @default.
- W2165422160 hasConcept C199360897 @default.
- W2165422160 hasConcept C24326235 @default.
- W2165422160 hasConcept C24890656 @default.
- W2165422160 hasConcept C25915539 @default.
- W2165422160 hasConcept C2779227376 @default.
- W2165422160 hasConcept C2779870107 @default.
- W2165422160 hasConcept C2781285689 @default.
- W2165422160 hasConcept C41008148 @default.
- W2165422160 hasConcept C49040817 @default.
- W2165422160 hasConcept C56951928 @default.
- W2165422160 hasConcept C57528182 @default.
- W2165422160 hasConcept C78519656 @default.
- W2165422160 hasConcept C97126364 @default.
- W2165422160 hasConcept C99101257 @default.
- W2165422160 hasConceptScore W2165422160C100460472 @default.
- W2165422160 hasConceptScore W2165422160C119599485 @default.
- W2165422160 hasConceptScore W2165422160C121332964 @default.
- W2165422160 hasConceptScore W2165422160C127413603 @default.
- W2165422160 hasConceptScore W2165422160C159985019 @default.
- W2165422160 hasConceptScore W2165422160C160671074 @default.
- W2165422160 hasConceptScore W2165422160C171250308 @default.
- W2165422160 hasConceptScore W2165422160C192562407 @default.
- W2165422160 hasConceptScore W2165422160C199360897 @default.
- W2165422160 hasConceptScore W2165422160C24326235 @default.
- W2165422160 hasConceptScore W2165422160C24890656 @default.
- W2165422160 hasConceptScore W2165422160C25915539 @default.
- W2165422160 hasConceptScore W2165422160C2779227376 @default.
- W2165422160 hasConceptScore W2165422160C2779870107 @default.
- W2165422160 hasConceptScore W2165422160C2781285689 @default.
- W2165422160 hasConceptScore W2165422160C41008148 @default.
- W2165422160 hasConceptScore W2165422160C49040817 @default.
- W2165422160 hasConceptScore W2165422160C56951928 @default.
- W2165422160 hasConceptScore W2165422160C57528182 @default.
- W2165422160 hasConceptScore W2165422160C78519656 @default.
- W2165422160 hasConceptScore W2165422160C97126364 @default.
- W2165422160 hasConceptScore W2165422160C99101257 @default.
- W2165422160 hasLocation W21654221601 @default.
- W2165422160 hasOpenAccess W2165422160 @default.
- W2165422160 hasPrimaryLocation W21654221601 @default.
- W2165422160 hasRelatedWork W1620652654 @default.
- W2165422160 hasRelatedWork W1982129081 @default.
- W2165422160 hasRelatedWork W1993721525 @default.
- W2165422160 hasRelatedWork W2008980251 @default.
- W2165422160 hasRelatedWork W2063797327 @default.
- W2165422160 hasRelatedWork W2165422160 @default.
- W2165422160 hasRelatedWork W2538360708 @default.
- W2165422160 hasRelatedWork W2964135123 @default.
- W2165422160 hasRelatedWork W3225860 @default.
- W2165422160 hasRelatedWork W2520398977 @default.
- W2165422160 isParatext "false" @default.
- W2165422160 isRetracted "false" @default.
- W2165422160 magId "2165422160" @default.
- W2165422160 workType "article" @default.