Matches in SemOpenAlex for { <https://semopenalex.org/work/W2165500959> ?p ?o ?g. }
- W2165500959 endingPage "1835" @default.
- W2165500959 startingPage "1830" @default.
- W2165500959 abstract "A method for determining the impurity doping profile of the transport epitaxial layer channel of surface acoustic wave (SAW) devices on piezoelectric semiconductors is presented. This technique utilizes the same structure already present in these devices; thus, testing can be done without altering or damaging the device. Another advantage of this technique over the equivalent C-V measurement is the high sensitivity of the transverse acoustoelectric voltage (TAV) to higher resistivity materials. Experiments and estimated doping profiles are presented along with the theoretical analysis of the measurement.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2165500959 created "2016-06-24" @default.
- W2165500959 creator A5022439020 @default.
- W2165500959 creator A5042969142 @default.
- W2165500959 creator A5051292417 @default.
- W2165500959 date "1993-01-01" @default.
- W2165500959 modified "2023-09-25" @default.
- W2165500959 title "A technique for profiling the epilayer channel of surface acoustic wave devices on piezoelectric semiconductors" @default.
- W2165500959 cites W1496485461 @default.
- W2165500959 cites W1970878732 @default.
- W2165500959 cites W1993506393 @default.
- W2165500959 cites W2000463172 @default.
- W2165500959 cites W2001219727 @default.
- W2165500959 cites W2014420948 @default.
- W2165500959 cites W2022266160 @default.
- W2165500959 cites W2036151264 @default.
- W2165500959 cites W2046853406 @default.
- W2165500959 cites W2049614163 @default.
- W2165500959 cites W2066620653 @default.
- W2165500959 cites W2066982076 @default.
- W2165500959 cites W2086014366 @default.
- W2165500959 cites W2090148654 @default.
- W2165500959 cites W2091381291 @default.
- W2165500959 cites W2093149151 @default.
- W2165500959 cites W2095423598 @default.
- W2165500959 cites W2107813001 @default.
- W2165500959 cites W2136297378 @default.
- W2165500959 cites W2147772643 @default.
- W2165500959 cites W2152397431 @default.
- W2165500959 cites W2153581194 @default.
- W2165500959 cites W2162883851 @default.
- W2165500959 cites W2478121256 @default.
- W2165500959 cites W600282500 @default.
- W2165500959 cites W84371624 @default.
- W2165500959 cites W1983837331 @default.
- W2165500959 doi "https://doi.org/10.1109/16.277341" @default.
- W2165500959 hasPublicationYear "1993" @default.
- W2165500959 type Work @default.
- W2165500959 sameAs 2165500959 @default.
- W2165500959 citedByCount "2" @default.
- W2165500959 crossrefType "journal-article" @default.
- W2165500959 hasAuthorship W2165500959A5022439020 @default.
- W2165500959 hasAuthorship W2165500959A5042969142 @default.
- W2165500959 hasAuthorship W2165500959A5051292417 @default.
- W2165500959 hasConcept C100082104 @default.
- W2165500959 hasConcept C108225325 @default.
- W2165500959 hasConcept C110738630 @default.
- W2165500959 hasConcept C111919701 @default.
- W2165500959 hasConcept C119599485 @default.
- W2165500959 hasConcept C121332964 @default.
- W2165500959 hasConcept C127162648 @default.
- W2165500959 hasConcept C127413603 @default.
- W2165500959 hasConcept C154954056 @default.
- W2165500959 hasConcept C159985019 @default.
- W2165500959 hasConcept C162954803 @default.
- W2165500959 hasConcept C165801399 @default.
- W2165500959 hasConcept C171250308 @default.
- W2165500959 hasConcept C187191949 @default.
- W2165500959 hasConcept C192562407 @default.
- W2165500959 hasConcept C24890656 @default.
- W2165500959 hasConcept C2779227376 @default.
- W2165500959 hasConcept C41008148 @default.
- W2165500959 hasConcept C49040817 @default.
- W2165500959 hasConcept C57863236 @default.
- W2165500959 hasConcept C62520636 @default.
- W2165500959 hasConcept C66938386 @default.
- W2165500959 hasConcept C71987851 @default.
- W2165500959 hasConceptScore W2165500959C100082104 @default.
- W2165500959 hasConceptScore W2165500959C108225325 @default.
- W2165500959 hasConceptScore W2165500959C110738630 @default.
- W2165500959 hasConceptScore W2165500959C111919701 @default.
- W2165500959 hasConceptScore W2165500959C119599485 @default.
- W2165500959 hasConceptScore W2165500959C121332964 @default.
- W2165500959 hasConceptScore W2165500959C127162648 @default.
- W2165500959 hasConceptScore W2165500959C127413603 @default.
- W2165500959 hasConceptScore W2165500959C154954056 @default.
- W2165500959 hasConceptScore W2165500959C159985019 @default.
- W2165500959 hasConceptScore W2165500959C162954803 @default.
- W2165500959 hasConceptScore W2165500959C165801399 @default.
- W2165500959 hasConceptScore W2165500959C171250308 @default.
- W2165500959 hasConceptScore W2165500959C187191949 @default.
- W2165500959 hasConceptScore W2165500959C192562407 @default.
- W2165500959 hasConceptScore W2165500959C24890656 @default.
- W2165500959 hasConceptScore W2165500959C2779227376 @default.
- W2165500959 hasConceptScore W2165500959C41008148 @default.
- W2165500959 hasConceptScore W2165500959C49040817 @default.
- W2165500959 hasConceptScore W2165500959C57863236 @default.
- W2165500959 hasConceptScore W2165500959C62520636 @default.
- W2165500959 hasConceptScore W2165500959C66938386 @default.
- W2165500959 hasConceptScore W2165500959C71987851 @default.
- W2165500959 hasIssue "10" @default.
- W2165500959 hasLocation W21655009591 @default.
- W2165500959 hasOpenAccess W2165500959 @default.
- W2165500959 hasPrimaryLocation W21655009591 @default.
- W2165500959 hasRelatedWork W1554003549 @default.
- W2165500959 hasRelatedWork W1975841684 @default.
- W2165500959 hasRelatedWork W1976761082 @default.
- W2165500959 hasRelatedWork W2006150690 @default.