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- W2166329896 abstract "The authors demonstrate high-quality homoepitaxial growth of thin P doped emitter layers by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on [100]-oriented crystalline silicon at T=325/spl deg/C. It is shown that epitaxial growth sets in when the gas-phase doping concentration PH/sub 3//SiH/sub 4/ exceeds 1500 ppm. From secondary ion mass spectroscopy analysis and electron spin resonance methods, it is concluded that in spite of the low processing temperature, P dopants diffuse about 100 nm deep into the wafer thereby moving the pn-junction away from the interface. Solar cells have been prepared with conversion efficiencies as high as 14%. This demonstrates the technological potential of the simple processing technique used here." @default.
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- W2166329896 date "2002-11-11" @default.
- W2166329896 modified "2023-09-24" @default.
- W2166329896 title "Gas-phase deposited thin-film silicon emitters for solar cells: high quality homoepitaxy at 325°C" @default.
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- W2166329896 doi "https://doi.org/10.1109/pvsc.2000.915753" @default.
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