Matches in SemOpenAlex for { <https://semopenalex.org/work/W2166584433> ?p ?o ?g. }
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- W2166584433 endingPage "245" @default.
- W2166584433 startingPage "237" @default.
- W2166584433 abstract "We report detailed experimental results on the electrochemical selective etching of doped Si. By using transmission electron microscopy analyses and spreading resistance measurements we investigated the dependence of the etching selectivity on the different parameters of the electrochemical cell, i.e., bias voltage and chemical solution. In B-doped samples immersed in buffered HF, the increase of bias voltage from 0.5 to 1 V produces a slight improvement of the etching selectivity and a B concentration as low as 1 x 10(17) cm(-3) can be successfully delineated at 1 V. A further improvement is achieved by using HF:HNO(3):CH(3)COOH or HF:HCl chemical mixtures for which the delineation sensitivity approaches the value of 1 x 10(16) cm(-3). In buffered HF As-doped regions can be delineated to a concentration of 2 x 10(17) cm(-3), independently of the bias voltage, in the range 2-4 V. These results were used to measure the 2D doping diffusion profiles in silicon wafers patterned with polycrystalline Si strips and implanted with As or B, by using different tilt and twist angles. The high resolution of the electrochemical delineation allowed us to evaluate very accurately the effects of the implant angles on the lateral doping distribution." @default.
- W2166584433 created "2016-06-24" @default.
- W2166584433 creator A5015520189 @default.
- W2166584433 creator A5047083897 @default.
- W2166584433 date "2000-05-01" @default.
- W2166584433 modified "2023-09-23" @default.
- W2166584433 title "High Resolution Measurements of Two-dimensional Dopant Diffusion in Silicon" @default.
- W2166584433 cites W1968974130 @default.
- W2166584433 cites W2040507075 @default.
- W2166584433 cites W2065445284 @default.
- W2166584433 cites W2076606605 @default.
- W2166584433 doi "https://doi.org/10.1017/s1431927600000398" @default.
- W2166584433 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/10790493" @default.
- W2166584433 hasPublicationYear "2000" @default.
- W2166584433 type Work @default.
- W2166584433 sameAs 2166584433 @default.
- W2166584433 citedByCount "8" @default.
- W2166584433 crossrefType "journal-article" @default.
- W2166584433 hasAuthorship W2166584433A5015520189 @default.
- W2166584433 hasAuthorship W2166584433A5047083897 @default.
- W2166584433 hasConcept C100460472 @default.
- W2166584433 hasConcept C113196181 @default.
- W2166584433 hasConcept C121332964 @default.
- W2166584433 hasConcept C137637335 @default.
- W2166584433 hasConcept C146088050 @default.
- W2166584433 hasConcept C147789679 @default.
- W2166584433 hasConcept C160671074 @default.
- W2166584433 hasConcept C161368742 @default.
- W2166584433 hasConcept C171250308 @default.
- W2166584433 hasConcept C17525397 @default.
- W2166584433 hasConcept C185592680 @default.
- W2166584433 hasConcept C191897082 @default.
- W2166584433 hasConcept C191952053 @default.
- W2166584433 hasConcept C192562407 @default.
- W2166584433 hasConcept C2779227376 @default.
- W2166584433 hasConcept C2780565262 @default.
- W2166584433 hasConcept C33220542 @default.
- W2166584433 hasConcept C43617362 @default.
- W2166584433 hasConcept C49040817 @default.
- W2166584433 hasConcept C52859227 @default.
- W2166584433 hasConcept C544956773 @default.
- W2166584433 hasConcept C57863236 @default.
- W2166584433 hasConcept C69357855 @default.
- W2166584433 hasConcept C87359718 @default.
- W2166584433 hasConcept C97355855 @default.
- W2166584433 hasConceptScore W2166584433C100460472 @default.
- W2166584433 hasConceptScore W2166584433C113196181 @default.
- W2166584433 hasConceptScore W2166584433C121332964 @default.
- W2166584433 hasConceptScore W2166584433C137637335 @default.
- W2166584433 hasConceptScore W2166584433C146088050 @default.
- W2166584433 hasConceptScore W2166584433C147789679 @default.
- W2166584433 hasConceptScore W2166584433C160671074 @default.
- W2166584433 hasConceptScore W2166584433C161368742 @default.
- W2166584433 hasConceptScore W2166584433C171250308 @default.
- W2166584433 hasConceptScore W2166584433C17525397 @default.
- W2166584433 hasConceptScore W2166584433C185592680 @default.
- W2166584433 hasConceptScore W2166584433C191897082 @default.
- W2166584433 hasConceptScore W2166584433C191952053 @default.
- W2166584433 hasConceptScore W2166584433C192562407 @default.
- W2166584433 hasConceptScore W2166584433C2779227376 @default.
- W2166584433 hasConceptScore W2166584433C2780565262 @default.
- W2166584433 hasConceptScore W2166584433C33220542 @default.
- W2166584433 hasConceptScore W2166584433C43617362 @default.
- W2166584433 hasConceptScore W2166584433C49040817 @default.
- W2166584433 hasConceptScore W2166584433C52859227 @default.
- W2166584433 hasConceptScore W2166584433C544956773 @default.
- W2166584433 hasConceptScore W2166584433C57863236 @default.
- W2166584433 hasConceptScore W2166584433C69357855 @default.
- W2166584433 hasConceptScore W2166584433C87359718 @default.
- W2166584433 hasConceptScore W2166584433C97355855 @default.
- W2166584433 hasIssue "3" @default.
- W2166584433 hasLocation W21665844331 @default.
- W2166584433 hasLocation W21665844332 @default.
- W2166584433 hasOpenAccess W2166584433 @default.
- W2166584433 hasPrimaryLocation W21665844331 @default.
- W2166584433 hasRelatedWork W1497161545 @default.
- W2166584433 hasRelatedWork W2018906364 @default.
- W2166584433 hasRelatedWork W2042371679 @default.
- W2166584433 hasRelatedWork W2052794911 @default.
- W2166584433 hasRelatedWork W2064091327 @default.
- W2166584433 hasRelatedWork W2064807885 @default.
- W2166584433 hasRelatedWork W2089398907 @default.
- W2166584433 hasRelatedWork W2095294273 @default.
- W2166584433 hasRelatedWork W2325894594 @default.
- W2166584433 hasRelatedWork W2903101056 @default.
- W2166584433 hasVolume "6" @default.
- W2166584433 isParatext "false" @default.
- W2166584433 isRetracted "false" @default.
- W2166584433 magId "2166584433" @default.
- W2166584433 workType "article" @default.