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- W2167103318 abstract "This study proposes a method of acquiring a high channel strain by locally oxidizing recessed Si1−xGex source/drain structures and forming a Ge condensation layer as an effective stressor. Combination of several transmission electron microscopy characterization techniques including nanobeam diffraction allowed us to analyze the thickness and composition of the Ge condensation layer formed upon oxidation, and the evolution of the channel strain. Nanobeam diffraction results demonstrate that this method can be critically used to effectively increase the channel strain." @default.
- W2167103318 created "2016-06-24" @default.
- W2167103318 creator A5015538254 @default.
- W2167103318 creator A5034148512 @default.
- W2167103318 creator A5055727484 @default.
- W2167103318 creator A5058862422 @default.
- W2167103318 creator A5085442242 @default.
- W2167103318 date "2011-03-28" @default.
- W2167103318 modified "2023-10-09" @default.
- W2167103318 title "Achievement of a high channel strain via dry oxidation of recessed source/drain Si1−xGex structures" @default.
- W2167103318 cites W1648253814 @default.
- W2167103318 cites W1741840575 @default.
- W2167103318 cites W1974675817 @default.
- W2167103318 cites W1979616748 @default.
- W2167103318 cites W1993860793 @default.
- W2167103318 cites W2010554102 @default.
- W2167103318 cites W2079391869 @default.
- W2167103318 cites W2104560781 @default.
- W2167103318 cites W2167103318 @default.
- W2167103318 doi "https://doi.org/10.1063/1.3573833" @default.
- W2167103318 hasPublicationYear "2011" @default.
- W2167103318 type Work @default.
- W2167103318 sameAs 2167103318 @default.
- W2167103318 citedByCount "12" @default.
- W2167103318 countsByYear W21671033182012 @default.
- W2167103318 countsByYear W21671033182013 @default.
- W2167103318 countsByYear W21671033182014 @default.
- W2167103318 countsByYear W21671033182015 @default.
- W2167103318 countsByYear W21671033182016 @default.
- W2167103318 countsByYear W21671033182019 @default.
- W2167103318 countsByYear W21671033182020 @default.
- W2167103318 crossrefType "journal-article" @default.
- W2167103318 hasAuthorship W2167103318A5015538254 @default.
- W2167103318 hasAuthorship W2167103318A5034148512 @default.
- W2167103318 hasAuthorship W2167103318A5055727484 @default.
- W2167103318 hasAuthorship W2167103318A5058862422 @default.
- W2167103318 hasAuthorship W2167103318A5085442242 @default.
- W2167103318 hasConcept C120665830 @default.
- W2167103318 hasConcept C121332964 @default.
- W2167103318 hasConcept C126322002 @default.
- W2167103318 hasConcept C127162648 @default.
- W2167103318 hasConcept C146088050 @default.
- W2167103318 hasConcept C159985019 @default.
- W2167103318 hasConcept C171250308 @default.
- W2167103318 hasConcept C178790620 @default.
- W2167103318 hasConcept C185592680 @default.
- W2167103318 hasConcept C192562407 @default.
- W2167103318 hasConcept C200093464 @default.
- W2167103318 hasConcept C207114421 @default.
- W2167103318 hasConcept C2778022156 @default.
- W2167103318 hasConcept C2779227376 @default.
- W2167103318 hasConcept C2780841128 @default.
- W2167103318 hasConcept C41008148 @default.
- W2167103318 hasConcept C49040817 @default.
- W2167103318 hasConcept C71924100 @default.
- W2167103318 hasConcept C76155785 @default.
- W2167103318 hasConcept C77176794 @default.
- W2167103318 hasConcept C77557913 @default.
- W2167103318 hasConcept C97355855 @default.
- W2167103318 hasConceptScore W2167103318C120665830 @default.
- W2167103318 hasConceptScore W2167103318C121332964 @default.
- W2167103318 hasConceptScore W2167103318C126322002 @default.
- W2167103318 hasConceptScore W2167103318C127162648 @default.
- W2167103318 hasConceptScore W2167103318C146088050 @default.
- W2167103318 hasConceptScore W2167103318C159985019 @default.
- W2167103318 hasConceptScore W2167103318C171250308 @default.
- W2167103318 hasConceptScore W2167103318C178790620 @default.
- W2167103318 hasConceptScore W2167103318C185592680 @default.
- W2167103318 hasConceptScore W2167103318C192562407 @default.
- W2167103318 hasConceptScore W2167103318C200093464 @default.
- W2167103318 hasConceptScore W2167103318C207114421 @default.
- W2167103318 hasConceptScore W2167103318C2778022156 @default.
- W2167103318 hasConceptScore W2167103318C2779227376 @default.
- W2167103318 hasConceptScore W2167103318C2780841128 @default.
- W2167103318 hasConceptScore W2167103318C41008148 @default.
- W2167103318 hasConceptScore W2167103318C49040817 @default.
- W2167103318 hasConceptScore W2167103318C71924100 @default.
- W2167103318 hasConceptScore W2167103318C76155785 @default.
- W2167103318 hasConceptScore W2167103318C77176794 @default.
- W2167103318 hasConceptScore W2167103318C77557913 @default.
- W2167103318 hasConceptScore W2167103318C97355855 @default.
- W2167103318 hasIssue "13" @default.
- W2167103318 hasLocation W21671033181 @default.
- W2167103318 hasOpenAccess W2167103318 @default.
- W2167103318 hasPrimaryLocation W21671033181 @default.
- W2167103318 hasRelatedWork W1971734251 @default.
- W2167103318 hasRelatedWork W2313860265 @default.
- W2167103318 hasRelatedWork W2327766684 @default.
- W2167103318 hasRelatedWork W2351110823 @default.
- W2167103318 hasRelatedWork W2354810034 @default.
- W2167103318 hasRelatedWork W2358923205 @default.
- W2167103318 hasRelatedWork W2384974966 @default.
- W2167103318 hasRelatedWork W2386584131 @default.
- W2167103318 hasRelatedWork W2473869162 @default.
- W2167103318 hasRelatedWork W2517199759 @default.
- W2167103318 hasVolume "98" @default.
- W2167103318 isParatext "false" @default.
- W2167103318 isRetracted "false" @default.
- W2167103318 magId "2167103318" @default.
- W2167103318 workType "article" @default.