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- W2167204092 abstract "We present a novel tilting micro-mirror that has a triangular waveform resonance response, and a resonance frequency that can be continuously and reversibly adjusted. The triangular waveform and the adjustability of the resonance frequency are crucially important for raster-scanning applications. Although the mirror is driven by electrostatic forces, the triangular waveform is achieved by mechanical means. Our micro-mirror is driven by up to 60 Volts whereas to achieve the same waveform without the novel mechanical design would require extremely high voltages." @default.
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- W2167204092 date "2007-01-01" @default.
- W2167204092 modified "2023-10-18" @default.
- W2167204092 title "A Novel Tilting Micromirror with a Triangular Waveform Resonance Response and an Adjustable Resonance Frequency for Raster Scanning Applications" @default.
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- W2167204092 doi "https://doi.org/10.1109/sensor.2007.4300431" @default.
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