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- W2167608745 abstract "Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices." @default.
- W2167608745 created "2016-06-24" @default.
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- W2167608745 date "2004-05-06" @default.
- W2167608745 modified "2023-09-25" @default.
- W2167608745 title "Bulk micromachined pressure sensor" @default.
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- W2167608745 doi "https://doi.org/10.1109/ugim.2003.1225752" @default.
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