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- W2167709758 abstract "A digital multifunctional laser machining system, including mechanical structure, software of computer and control system, is designed. After briefly describing the laser machining system and principle of data processing, some objects are processed by CO2 laser (75W). By analyzing experimental data and adding in error compensation, the structures with better quality are machined. In order to realize micro fabrication, a ultraviolet laser replaces CO2 laser. With different laser parameters, some micro silicon structures will be fabricated. And a morphological characteristic is evaluated by optical microscopy." @default.
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- W2167709758 date "2008-01-01" @default.
- W2167709758 modified "2023-09-24" @default.
- W2167709758 title "Study of fabricated system based on laser" @default.
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- W2167709758 doi "https://doi.org/10.1109/nems.2008.4484420" @default.
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