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• W2167788424 abstract "This letter presents a novel radio frequency (RF) inductor in a monolithic inductor-capacitor circuit developed by using micro-electromechanical systems (MEMS) fabrication technology. The inductor consists of 40-μm-thick single crystalline silicon spiral with copper surface coating as the conductor, which is suspended on a glass substrate. The fabricated inductor exhibits a self-resonance frequency higher than 15GHz, with the quality factor more than 35 and inductance over 5nH at 11.3GHz. Simulations based on a compact equivalent circuit model with parameters extracted using a characteristic-function approach have also been carried out for the inductor, and good agreement with measurements is obtained." @default.
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• W2167788424 date "2005-12-01" @default.
• W2167788424 modified "2023-09-23" @default.
• W2167788424 title "RF inductors with suspended and copper coated thick crystalline silicon spirals for monolithic MEMS LC circuits" @default.
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• W2167788424 doi "https://doi.org/10.1109/lmwc.2005.860009" @default.
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