Matches in SemOpenAlex for { <https://semopenalex.org/work/W2167895408> ?p ?o ?g. }
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- W2167895408 endingPage "1075" @default.
- W2167895408 startingPage "1071" @default.
- W2167895408 abstract "Growth and microstructure of ternary Ti3SiC2 compound layers on 4H-SiC, which play am important role in formation of TiAl-based ohmic contacts to p-type SiC, were investigated in this study. The Ti3SiC2 layer was fabricated by deposition of Ti/Al contacts (where a slash “/” indicates the deposition sequence) on the 4H-SiC(0001) substrate and subsequent rapid thermal anneal at 1000°C in ultra high vacuum. After annealing, reaction products and microstructure of the Ti3SiC2 layer were investigated by X ray diffraction analysis and transmission electron microscopy observations in order to understand the growth processes of the Ti3SiC2 layer and determination of the Ti3SiC2/4H-SiC interface structure. The Ti3SiC2 layers with hexagonal plate shape were observed to grow epitaxially on the SiC(0001) surface by anisotropic lateral growth process. The interface was found to have a hetero-epitaxial orientation relationship of (0001)TSC||(0001)S and [0bar110]TSC||[0bar110]S where TSC and S represent Ti3SiC2 and 4H-SiC, respectively, and have well-defined ledge-terrace structures with low density of misfit dislocations due to an extremely low lattice mismatch of 0.4% between Ti3SiC2 and 4H-SiC." @default.
- W2167895408 created "2016-06-24" @default.
- W2167895408 creator A5003930310 @default.
- W2167895408 creator A5013635330 @default.
- W2167895408 creator A5039955007 @default.
- W2167895408 creator A5055622569 @default.
- W2167895408 creator A5089273020 @default.
- W2167895408 creator A5091667084 @default.
- W2167895408 date "2009-01-01" @default.
- W2167895408 modified "2023-10-14" @default.
- W2167895408 title "Growth and Microstructure of Epitaxial Ti<SUB>3</SUB>SiC<SUB>2</SUB> Contact Layers on SiC" @default.
- W2167895408 cites W1975533844 @default.
- W2167895408 cites W1976367170 @default.
- W2167895408 cites W1977386123 @default.
- W2167895408 cites W2001974477 @default.
- W2167895408 cites W2012516898 @default.
- W2167895408 cites W2017670265 @default.
- W2167895408 cites W2020911076 @default.
- W2167895408 cites W2041616633 @default.
- W2167895408 cites W2045613682 @default.
- W2167895408 cites W2046566322 @default.
- W2167895408 cites W2048603655 @default.
- W2167895408 cites W2049196100 @default.
- W2167895408 cites W2070572965 @default.
- W2167895408 cites W2080536095 @default.
- W2167895408 cites W2082435426 @default.
- W2167895408 cites W2089042111 @default.
- W2167895408 cites W2093642821 @default.
- W2167895408 cites W2113158221 @default.
- W2167895408 cites W2134158954 @default.
- W2167895408 cites W2150066843 @default.
- W2167895408 doi "https://doi.org/10.2320/matertrans.mc200831" @default.
- W2167895408 hasPublicationYear "2009" @default.
- W2167895408 type Work @default.
- W2167895408 sameAs 2167895408 @default.
- W2167895408 citedByCount "30" @default.
- W2167895408 countsByYear W21678954082012 @default.
- W2167895408 countsByYear W21678954082013 @default.
- W2167895408 countsByYear W21678954082014 @default.
- W2167895408 countsByYear W21678954082015 @default.
- W2167895408 countsByYear W21678954082016 @default.
- W2167895408 countsByYear W21678954082018 @default.
- W2167895408 countsByYear W21678954082019 @default.
- W2167895408 countsByYear W21678954082020 @default.
- W2167895408 countsByYear W21678954082021 @default.
- W2167895408 countsByYear W21678954082022 @default.
- W2167895408 crossrefType "journal-article" @default.
- W2167895408 hasAuthorship W2167895408A5003930310 @default.
- W2167895408 hasAuthorship W2167895408A5013635330 @default.
- W2167895408 hasAuthorship W2167895408A5039955007 @default.
- W2167895408 hasAuthorship W2167895408A5055622569 @default.
- W2167895408 hasAuthorship W2167895408A5089273020 @default.
- W2167895408 hasAuthorship W2167895408A5091667084 @default.
- W2167895408 hasBestOaLocation W21678954081 @default.
- W2167895408 hasConcept C110738630 @default.
- W2167895408 hasConcept C146088050 @default.
- W2167895408 hasConcept C159985019 @default.
- W2167895408 hasConcept C171250308 @default.
- W2167895408 hasConcept C185592680 @default.
- W2167895408 hasConcept C192562407 @default.
- W2167895408 hasConcept C2777855556 @default.
- W2167895408 hasConcept C2779227376 @default.
- W2167895408 hasConcept C8010536 @default.
- W2167895408 hasConcept C87976508 @default.
- W2167895408 hasConceptScore W2167895408C110738630 @default.
- W2167895408 hasConceptScore W2167895408C146088050 @default.
- W2167895408 hasConceptScore W2167895408C159985019 @default.
- W2167895408 hasConceptScore W2167895408C171250308 @default.
- W2167895408 hasConceptScore W2167895408C185592680 @default.
- W2167895408 hasConceptScore W2167895408C192562407 @default.
- W2167895408 hasConceptScore W2167895408C2777855556 @default.
- W2167895408 hasConceptScore W2167895408C2779227376 @default.
- W2167895408 hasConceptScore W2167895408C8010536 @default.
- W2167895408 hasConceptScore W2167895408C87976508 @default.
- W2167895408 hasIssue "5" @default.
- W2167895408 hasLocation W21678954081 @default.
- W2167895408 hasOpenAccess W2167895408 @default.
- W2167895408 hasPrimaryLocation W21678954081 @default.
- W2167895408 hasRelatedWork W2058940780 @default.
- W2167895408 hasRelatedWork W2059268031 @default.
- W2167895408 hasRelatedWork W2090404944 @default.
- W2167895408 hasRelatedWork W2354424856 @default.
- W2167895408 hasRelatedWork W2357211366 @default.
- W2167895408 hasRelatedWork W2375093060 @default.
- W2167895408 hasRelatedWork W2377758915 @default.
- W2167895408 hasRelatedWork W2392473810 @default.
- W2167895408 hasRelatedWork W2605776044 @default.
- W2167895408 hasRelatedWork W2803456621 @default.
- W2167895408 hasVolume "50" @default.
- W2167895408 isParatext "false" @default.
- W2167895408 isRetracted "false" @default.
- W2167895408 magId "2167895408" @default.
- W2167895408 workType "article" @default.