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- W2167982628 abstract "Double-patterning lithography is a choice for critical layers in 32 nm and 22 nm technologies. Double patterning lithography techniques require additional masks to manufacture a single device layer. Consequently, double-patterning lithography brings overlay as a challenge that introduces additional variability to gate coupling capacitances. This additional variability may negatively impact circuit performance. We provide variational device and circuit analysis methods for double-patterning lithography. We demonstrate our methodology using TCAD and circuit simulations in a 32 nm technology. Proposed results shed light On understanding the possible impact of overlay on device and circuit performance." @default.
- W2167982628 created "2016-06-24" @default.
- W2167982628 creator A5084170591 @default.
- W2167982628 date "2011-03-01" @default.
- W2167982628 modified "2023-09-23" @default.
- W2167982628 title "Device and circuit implications of double-patterning — A designer's perspective" @default.
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- W2167982628 doi "https://doi.org/10.1109/isqed.2011.5770814" @default.
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