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- W2168021244 abstract "The contrast of electron channeling patterns in all backscattered electrons is experimentally estimated for low-index reflections of Al, Si, Cu, and Au specimens by measuring the specimen current in the beam rocking mode of the scanning electron microscope at 20 to 50 kV. From the contrast, the channeling signal in the backscattering yield is determined and compared with that predicted by the theories so far established. There is a difference by a factor of two to three between the experimental and theoretical channeling signals. The channeling contrast is also estimated at oblique incidence for the (220) reflection of silicon. There is no marked variation of the contrast with the angle of specimen tilt. Es wird der Kontrast von Elektronenkanalisierungsdiagrammen in allen rückgestreuten Elektronen experimentell für niedrig-indizierte Reflexionen von Al, Si-, Cu- und Au-Proben durch Messung des Probenstroms in der „beam rocking”︁-Mode des Rasterelektronenmikroskops bei 20 bis 50 kV bestimmt. Aus dem Kontrast wird das Kanalisierungssignal in der Rückstreuausbeute bestimmt und mit dem verglichen, das von den bisher aufgestellten Theorien vorhergesagt wird. Es ergibt sich eine Differenz mit einem Faktor von zwei bis drei zwischen experimentellen und theoretischen Kanalisierungssignalen. Der Kanalisierungskontrast wird auch bei schräger Inzidenz für die (220)-Reflexionen von Silizium berechnet. Es existiert eine merkliche Änderung des Kontrasts mit dem Winkel der Probenkippung." @default.
- W2168021244 created "2016-06-24" @default.
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- W2168021244 date "1977-11-16" @default.
- W2168021244 modified "2023-09-26" @default.
- W2168021244 title "Experimental aspects of electron channeling patterns in scanning electron microscopy. I. Measurement of contrast" @default.
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- W2168021244 doi "https://doi.org/10.1002/pssa.2210440114" @default.
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