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- W2168105610 abstract "By using an ultra-clean low-energy ion bombardment process, we have succeeded in forming Cu interconnects having giant grains (typical grain sizes of /spl sim/100 /spl mu/m). The giant-grain Cu interconnects exhibit three-orders of magnitude larger migration resistance than conventional Al-alloy interconnects. Moreover, by exposing the giant-grain Cu interconnects in SiH/sub 4/ ambient at 200/spl deg/C, Si selective deposition on Cu interconnect surface is successfully carried out. The surface-silicide passivated giant-grain Cu interconnects exhibit four orders of magnitude larger resistance against electromigration and stressmigration than conventional Al-alloy interconnects." @default.
- W2168105610 created "2016-06-24" @default.
- W2168105610 creator A5008116840 @default.
- W2168105610 creator A5016615919 @default.
- W2168105610 creator A5037433724 @default.
- W2168105610 creator A5062715209 @default.
- W2168105610 creator A5071071704 @default.
- W2168105610 date "2002-11-19" @default.
- W2168105610 modified "2023-09-25" @default.
- W2168105610 title "Excellent electro/stress-migration-resistance giant-grain copper interconnect technology for high-performance power devices" @default.
- W2168105610 cites W2021466971 @default.
- W2168105610 cites W2026437391 @default.
- W2168105610 cites W2026906452 @default.
- W2168105610 cites W2034884271 @default.
- W2168105610 cites W2036071642 @default.
- W2168105610 cites W2045175736 @default.
- W2168105610 cites W2106220584 @default.
- W2168105610 cites W2465447922 @default.
- W2168105610 cites W2540628634 @default.
- W2168105610 doi "https://doi.org/10.1109/ispsd.1995.515078" @default.
- W2168105610 hasPublicationYear "2002" @default.
- W2168105610 type Work @default.
- W2168105610 sameAs 2168105610 @default.
- W2168105610 citedByCount "0" @default.
- W2168105610 crossrefType "proceedings-article" @default.
- W2168105610 hasAuthorship W2168105610A5008116840 @default.
- W2168105610 hasAuthorship W2168105610A5016615919 @default.
- W2168105610 hasAuthorship W2168105610A5037433724 @default.
- W2168105610 hasAuthorship W2168105610A5062715209 @default.
- W2168105610 hasAuthorship W2168105610A5071071704 @default.
- W2168105610 hasConcept C123745756 @default.
- W2168105610 hasConcept C138055206 @default.
- W2168105610 hasConcept C138885662 @default.
- W2168105610 hasConcept C159985019 @default.
- W2168105610 hasConcept C191897082 @default.
- W2168105610 hasConcept C192191005 @default.
- W2168105610 hasConcept C192562407 @default.
- W2168105610 hasConcept C21036866 @default.
- W2168105610 hasConcept C2779227376 @default.
- W2168105610 hasConcept C2780026712 @default.
- W2168105610 hasConcept C2780901251 @default.
- W2168105610 hasConcept C31258907 @default.
- W2168105610 hasConcept C41008148 @default.
- W2168105610 hasConcept C41895202 @default.
- W2168105610 hasConcept C47908070 @default.
- W2168105610 hasConcept C49040817 @default.
- W2168105610 hasConcept C544778455 @default.
- W2168105610 hasConcept C544956773 @default.
- W2168105610 hasConcept C66825105 @default.
- W2168105610 hasConcept C87976508 @default.
- W2168105610 hasConceptScore W2168105610C123745756 @default.
- W2168105610 hasConceptScore W2168105610C138055206 @default.
- W2168105610 hasConceptScore W2168105610C138885662 @default.
- W2168105610 hasConceptScore W2168105610C159985019 @default.
- W2168105610 hasConceptScore W2168105610C191897082 @default.
- W2168105610 hasConceptScore W2168105610C192191005 @default.
- W2168105610 hasConceptScore W2168105610C192562407 @default.
- W2168105610 hasConceptScore W2168105610C21036866 @default.
- W2168105610 hasConceptScore W2168105610C2779227376 @default.
- W2168105610 hasConceptScore W2168105610C2780026712 @default.
- W2168105610 hasConceptScore W2168105610C2780901251 @default.
- W2168105610 hasConceptScore W2168105610C31258907 @default.
- W2168105610 hasConceptScore W2168105610C41008148 @default.
- W2168105610 hasConceptScore W2168105610C41895202 @default.
- W2168105610 hasConceptScore W2168105610C47908070 @default.
- W2168105610 hasConceptScore W2168105610C49040817 @default.
- W2168105610 hasConceptScore W2168105610C544778455 @default.
- W2168105610 hasConceptScore W2168105610C544956773 @default.
- W2168105610 hasConceptScore W2168105610C66825105 @default.
- W2168105610 hasConceptScore W2168105610C87976508 @default.
- W2168105610 hasLocation W21681056101 @default.
- W2168105610 hasOpenAccess W2168105610 @default.
- W2168105610 hasPrimaryLocation W21681056101 @default.
- W2168105610 hasRelatedWork W1515658914 @default.
- W2168105610 hasRelatedWork W1520412220 @default.
- W2168105610 hasRelatedWork W1670229420 @default.
- W2168105610 hasRelatedWork W1834622852 @default.
- W2168105610 hasRelatedWork W1893585013 @default.
- W2168105610 hasRelatedWork W1917306228 @default.
- W2168105610 hasRelatedWork W1947317696 @default.
- W2168105610 hasRelatedWork W2008966508 @default.
- W2168105610 hasRelatedWork W2041142637 @default.
- W2168105610 hasRelatedWork W2070224591 @default.
- W2168105610 hasRelatedWork W2106176243 @default.
- W2168105610 hasRelatedWork W2124013081 @default.
- W2168105610 hasRelatedWork W2140993497 @default.
- W2168105610 hasRelatedWork W2148419540 @default.
- W2168105610 hasRelatedWork W2160118000 @default.
- W2168105610 hasRelatedWork W2380265292 @default.
- W2168105610 hasRelatedWork W2532382548 @default.
- W2168105610 hasRelatedWork W2537464638 @default.
- W2168105610 hasRelatedWork W2538472476 @default.
- W2168105610 hasRelatedWork W2160247492 @default.
- W2168105610 isParatext "false" @default.
- W2168105610 isRetracted "false" @default.
- W2168105610 magId "2168105610" @default.
- W2168105610 workType "article" @default.