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- W2168288010 abstract "In this paper the basic MEMS structure and main development problems are considered. It's also accented on the design of the most used types of MEMS parts and the most popular MEMS applications are mentioned. In this paper the main points and tasks of the microelectromechanical systems development are described." @default.
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- W2168288010 date "2008-05-01" @default.
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- W2168288010 title "The main points of the microelectromechanical systems development" @default.
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- W2168288010 doi "https://doi.org/10.1109/memstech.2008.4558754" @default.
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