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- W2168308005 abstract "Catadioptric step-and-scan lithography offers specific advantages over step-and-repeat all- refractive (dioptric) systems as resolution requirements drive to 0.25micrometers in volume production. For the Micrascan family of step-and-scan tools this step in the evolutionary path from 0.35micrometers to 0.25micrometers has involved changes to both the projection optics and illumination system." @default.
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- W2168308005 date "1996-06-07" @default.
- W2168308005 modified "2023-10-09" @default.
- W2168308005 title "<title>Micrascan III: 0.25-um resolution step-and-scan system</title>" @default.
- W2168308005 doi "https://doi.org/10.1117/12.240939" @default.
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