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- W2168482017 abstract "An advanced CMOS process, which used rapid vapor-phase doping (RVD) for pMOSFETs and solid-phase diffusion (SPD) for nMOSFETs, has been developed. Using the RVD technique, a 40-nm-deep p-type extension with a sheet resistance as low as 400 /spl Omega//sq has been realized. These RVD and SPD devices demonstrate excellent short-channel characteristics down to 0.1 /spl mu/m channel length and 40% higher drain current, compared with conventional devices with ion implanted source/drain (S/D) extensions, and high-speed circuit performance. We investigate the effect of the S/D extension structure on the device performance and find that a gate extension overlap of 25 nm enables excellent dc and high-speed circuit performance in 0.1-/spl mu/m devices." @default.
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- W2168482017 date "2004-01-01" @default.
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- W2168482017 title "A CMOS-Compatible Rapid Vapor-Phase Doping Process for CMOS Scaling" @default.
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