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- W2168485440 abstract "Summary form only given, as follows. Helium bubbles are formed in silicon using high dose plasma immersion ion implantation (PIII). Thermal annealing of the implanted sample at temperature over 700/spl deg/C causes the helium bubbles to diffuse out of the silicon substrate. The cavities formed provide active sites for impurity gettering. The gettering of copper and gold impurities are characterized by secondary ion mass spectrometry and the results demonstrate that the cavities are effective sinks for copper and gold. The gettering process also remains stable up to 1200/spl deg/C. PIII is thus an excellent technique to create cavities for gettering sites, for example, on the backside of silicon wafers. The high-dose and immersion characteristics of PIII make it an ideal technique for future 300 mm and 400 mm silicon wafers." @default.
- W2168485440 created "2016-06-24" @default.
- W2168485440 creator A5009041573 @default.
- W2168485440 creator A5025427843 @default.
- W2168485440 creator A5041885657 @default.
- W2168485440 creator A5043065335 @default.
- W2168485440 creator A5084907779 @default.
- W2168485440 date "2002-12-23" @default.
- W2168485440 modified "2023-09-24" @default.
- W2168485440 title "Gettering effects of helium cavities created by high dose plasma immersion ion implantation" @default.
- W2168485440 cites W2128511981 @default.
- W2168485440 doi "https://doi.org/10.1109/plasma.1996.550208" @default.
- W2168485440 hasPublicationYear "2002" @default.
- W2168485440 type Work @default.
- W2168485440 sameAs 2168485440 @default.
- W2168485440 citedByCount "0" @default.
- W2168485440 crossrefType "proceedings-article" @default.
- W2168485440 hasAuthorship W2168485440A5009041573 @default.
- W2168485440 hasAuthorship W2168485440A5025427843 @default.
- W2168485440 hasAuthorship W2168485440A5041885657 @default.
- W2168485440 hasAuthorship W2168485440A5043065335 @default.
- W2168485440 hasAuthorship W2168485440A5084907779 @default.
- W2168485440 hasConcept C113196181 @default.
- W2168485440 hasConcept C125099081 @default.
- W2168485440 hasConcept C145148216 @default.
- W2168485440 hasConcept C160671074 @default.
- W2168485440 hasConcept C177322064 @default.
- W2168485440 hasConcept C178790620 @default.
- W2168485440 hasConcept C185592680 @default.
- W2168485440 hasConcept C191897082 @default.
- W2168485440 hasConcept C192562407 @default.
- W2168485440 hasConcept C2777855556 @default.
- W2168485440 hasConcept C2778702798 @default.
- W2168485440 hasConcept C41823505 @default.
- W2168485440 hasConcept C43617362 @default.
- W2168485440 hasConcept C49040817 @default.
- W2168485440 hasConcept C53143962 @default.
- W2168485440 hasConcept C544778455 @default.
- W2168485440 hasConcept C544956773 @default.
- W2168485440 hasConcept C546029482 @default.
- W2168485440 hasConcept C57863236 @default.
- W2168485440 hasConcept C71987851 @default.
- W2168485440 hasConcept C77671233 @default.
- W2168485440 hasConceptScore W2168485440C113196181 @default.
- W2168485440 hasConceptScore W2168485440C125099081 @default.
- W2168485440 hasConceptScore W2168485440C145148216 @default.
- W2168485440 hasConceptScore W2168485440C160671074 @default.
- W2168485440 hasConceptScore W2168485440C177322064 @default.
- W2168485440 hasConceptScore W2168485440C178790620 @default.
- W2168485440 hasConceptScore W2168485440C185592680 @default.
- W2168485440 hasConceptScore W2168485440C191897082 @default.
- W2168485440 hasConceptScore W2168485440C192562407 @default.
- W2168485440 hasConceptScore W2168485440C2777855556 @default.
- W2168485440 hasConceptScore W2168485440C2778702798 @default.
- W2168485440 hasConceptScore W2168485440C41823505 @default.
- W2168485440 hasConceptScore W2168485440C43617362 @default.
- W2168485440 hasConceptScore W2168485440C49040817 @default.
- W2168485440 hasConceptScore W2168485440C53143962 @default.
- W2168485440 hasConceptScore W2168485440C544778455 @default.
- W2168485440 hasConceptScore W2168485440C544956773 @default.
- W2168485440 hasConceptScore W2168485440C546029482 @default.
- W2168485440 hasConceptScore W2168485440C57863236 @default.
- W2168485440 hasConceptScore W2168485440C71987851 @default.
- W2168485440 hasConceptScore W2168485440C77671233 @default.
- W2168485440 hasLocation W21684854401 @default.
- W2168485440 hasOpenAccess W2168485440 @default.
- W2168485440 hasPrimaryLocation W21684854401 @default.
- W2168485440 hasRelatedWork W1987034724 @default.
- W2168485440 hasRelatedWork W2001050784 @default.
- W2168485440 hasRelatedWork W2011734256 @default.
- W2168485440 hasRelatedWork W2013870132 @default.
- W2168485440 hasRelatedWork W2018205460 @default.
- W2168485440 hasRelatedWork W2022624846 @default.
- W2168485440 hasRelatedWork W2023135733 @default.
- W2168485440 hasRelatedWork W2049730117 @default.
- W2168485440 hasRelatedWork W2065982884 @default.
- W2168485440 hasRelatedWork W2071618556 @default.
- W2168485440 hasRelatedWork W2078427271 @default.
- W2168485440 hasRelatedWork W2083700019 @default.
- W2168485440 hasRelatedWork W2085875409 @default.
- W2168485440 hasRelatedWork W2149044536 @default.
- W2168485440 hasRelatedWork W2151745349 @default.
- W2168485440 hasRelatedWork W2154291153 @default.
- W2168485440 hasRelatedWork W2218705689 @default.
- W2168485440 hasRelatedWork W2313807399 @default.
- W2168485440 hasRelatedWork W2470105485 @default.
- W2168485440 hasRelatedWork W71215106 @default.
- W2168485440 isParatext "false" @default.
- W2168485440 isRetracted "false" @default.
- W2168485440 magId "2168485440" @default.
- W2168485440 workType "article" @default.