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• W2168676380 endingPage "F105" @default.
• W2168676380 startingPage "F105" @default.
• W2168676380 abstract "Pulsed-plasma chemical vapor deposition was used to deposit thin films from four different organosilicon precursors using water as the oxidant. The precursors varied in structure, chemical composition, and type of organic substituent. Differences in film structure were observed based on precursor structure and type of organic substituents. More reactive substituents, such as vinyl groups, facilitated cross-linking. At low power (200 W), film structure was dictated by precursor identity. At high power (400 W) film structure became more uniform and precursor identity was less important. Mechanical and thermal properties correlated with plasma power and could be explained by the continuous random network theory and percolation of rigidity arguments. Low-power samples are relatively soft, with hardness values between 0.13 and 0.54 GPa. High-power samples are more extensively cross-linked and oxidized, resulting in enhanced mechanical properties, and had hardness values between 0.68 and 3.2 GPa, depending upon precursor identity. Thermal stability was strongly correlated to the degree of cross-linking, with non-cross-linked films showing up to 30% thickness loss upon annealing. Cross-linked films exhibited less than 8% thickness loss. Dielectric constants for the films ranged between 2.4 and 4.3 and were primarily dependent upon the extent of oxidation and organic content remaining in the films. © 2004 The Electrochemical Society. All rights reserved." @default.
• W2168676380 created "2016-06-24" @default.
• W2168676380 creator A5061958103 @default.
• W2168676380 creator A5066209549 @default.
• W2168676380 date "2004-01-01" @default.
• W2168676380 modified "2023-10-17" @default.
• W2168676380 title "Organosilicon Thin Films Deposited from Cyclic and Acyclic Precursors Using Water as an Oxidant" @default.
• W2168676380 cites W1969428761 @default.
• W2168676380 cites W1974543817 @default.
• W2168676380 cites W1981058187 @default.
• W2168676380 cites W1990844529 @default.
• W2168676380 cites W2003910499 @default.
• W2168676380 cites W2004605090 @default.
• W2168676380 cites W2014944380 @default.
• W2168676380 cites W2026147494 @default.
• W2168676380 cites W2026364913 @default.
• W2168676380 cites W2028169409 @default.
• W2168676380 cites W2034497904 @default.
• W2168676380 cites W2050240486 @default.
• W2168676380 cites W2053387867 @default.
• W2168676380 cites W2055833351 @default.
• W2168676380 cites W2060481563 @default.
• W2168676380 cites W2061124067 @default.
• W2168676380 cites W2061235593 @default.
• W2168676380 cites W2061367080 @default.
• W2168676380 cites W2065674696 @default.
• W2168676380 cites W2066112993 @default.
• W2168676380 cites W2070269613 @default.
• W2168676380 cites W2071171547 @default.
• W2168676380 cites W2082808799 @default.
• W2168676380 cites W2086933933 @default.
• W2168676380 cites W2095073975 @default.
• W2168676380 cites W2116927355 @default.
• W2168676380 cites W2119680087 @default.
• W2168676380 cites W2132087474 @default.
• W2168676380 cites W2138966144 @default.
• W2168676380 cites W2163767625 @default.
• W2168676380 cites W2314531164 @default.
• W2168676380 cites W2328418047 @default.
• W2168676380 cites W2340283963 @default.
• W2168676380 doi "https://doi.org/10.1149/1.1688801" @default.
• W2168676380 hasPublicationYear "2004" @default.
• W2168676380 type Work @default.
• W2168676380 sameAs 2168676380 @default.
• W2168676380 citedByCount "46" @default.
• W2168676380 countsByYear W21686763802012 @default.
• W2168676380 countsByYear W21686763802013 @default.
• W2168676380 countsByYear W21686763802014 @default.
• W2168676380 countsByYear W21686763802015 @default.
• W2168676380 countsByYear W21686763802016 @default.
• W2168676380 countsByYear W21686763802017 @default.
• W2168676380 countsByYear W21686763802018 @default.
• W2168676380 countsByYear W21686763802021 @default.
• W2168676380 countsByYear W21686763802022 @default.
• W2168676380 countsByYear W21686763802023 @default.
• W2168676380 crossrefType "journal-article" @default.
• W2168676380 hasAuthorship W2168676380A5061958103 @default.
• W2168676380 hasAuthorship W2168676380A5066209549 @default.
• W2168676380 hasConcept C127413603 @default.
• W2168676380 hasConcept C133386390 @default.
• W2168676380 hasConcept C147789679 @default.
• W2168676380 hasConcept C159985019 @default.
• W2168676380 hasConcept C171250308 @default.
• W2168676380 hasConcept C17525397 @default.
• W2168676380 hasConcept C178790620 @default.
• W2168676380 hasConcept C185592680 @default.
• W2168676380 hasConcept C188027245 @default.
• W2168676380 hasConcept C19067145 @default.
• W2168676380 hasConcept C192562407 @default.
• W2168676380 hasConcept C2777855556 @default.
• W2168676380 hasConcept C2778736354 @default.
• W2168676380 hasConcept C42360764 @default.
• W2168676380 hasConcept C49040817 @default.
• W2168676380 hasConcept C52859227 @default.
• W2168676380 hasConcept C57410435 @default.
• W2168676380 hasConcept C59061564 @default.
• W2168676380 hasConceptScore W2168676380C127413603 @default.
• W2168676380 hasConceptScore W2168676380C133386390 @default.
• W2168676380 hasConceptScore W2168676380C147789679 @default.
• W2168676380 hasConceptScore W2168676380C159985019 @default.
• W2168676380 hasConceptScore W2168676380C171250308 @default.
• W2168676380 hasConceptScore W2168676380C17525397 @default.
• W2168676380 hasConceptScore W2168676380C178790620 @default.
• W2168676380 hasConceptScore W2168676380C185592680 @default.
• W2168676380 hasConceptScore W2168676380C188027245 @default.
• W2168676380 hasConceptScore W2168676380C19067145 @default.
• W2168676380 hasConceptScore W2168676380C192562407 @default.
• W2168676380 hasConceptScore W2168676380C2777855556 @default.
• W2168676380 hasConceptScore W2168676380C2778736354 @default.
• W2168676380 hasConceptScore W2168676380C42360764 @default.
• W2168676380 hasConceptScore W2168676380C49040817 @default.
• W2168676380 hasConceptScore W2168676380C52859227 @default.
• W2168676380 hasConceptScore W2168676380C57410435 @default.
• W2168676380 hasConceptScore W2168676380C59061564 @default.
• W2168676380 hasIssue "5" @default.
• W2168676380 hasLocation W21686763801 @default.
• W2168676380 hasOpenAccess W2168676380 @default.
• W2168676380 hasPrimaryLocation W21686763801 @default.

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