FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2168840227> ?p ?o ?g. }

• W2168840227 endingPage "842" @default.
• W2168840227 startingPage "839" @default.
• W2168840227 abstract "In this work we have investigated the effect of oxygen and argon impurities on the residual stress, crystal structure and piezoelectric response of sputtered AlN thin films for surface acoustic wave applications. The AlN films were deposited on Si (100) wafers by RF sputtering of an Al target in an Ar/N2 gas mixture. The substrate bias voltage and the pressure were adjusted to obtain films with pure c-axis orientation. The crystal quality and the grain size of the films were assessed by X-ray diffractometry. The Al:N atomic ratio and the Ar content were measured by Rutherford backscattering spectrometry. The oxygen content was determined by an improved particle-induced γ-ray emission method. Our results indicate that the residual stress is associated with the presence of Ar in the film but not with oxygen contamination. There is also a correlation between the Ar content and the crystal quality. The grain size depends on the oxygen contamination, but is also affected by other factors. Finally, the electromechanical coupling factor decreases significantly with oxygen content but is independent of Ar impurities." @default.
• W2168840227 created "2016-06-24" @default.
• W2168840227 creator A5005933841 @default.
• W2168840227 creator A5010430485 @default.
• W2168840227 creator A5019229508 @default.
• W2168840227 creator A5020934002 @default.
• W2168840227 creator A5032372352 @default.
• W2168840227 creator A5048270648 @default.
• W2168840227 creator A5056311398 @default.
• W2168840227 creator A5067617107 @default.
• W2168840227 date "2004-04-01" @default.
• W2168840227 modified "2023-10-16" @default.
• W2168840227 title "Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films" @default.
• W2168840227 cites W1977000147 @default.
• W2168840227 cites W2000613422 @default.
• W2168840227 cites W2021435045 @default.
• W2168840227 cites W2050890807 @default.
• W2168840227 cites W2054342358 @default.
• W2168840227 cites W2090093355 @default.
• W2168840227 cites W2101267509 @default.
• W2168840227 cites W2108728884 @default.
• W2168840227 cites W2116333593 @default.
• W2168840227 cites W2162947331 @default.
• W2168840227 doi "https://doi.org/10.1016/j.diamond.2003.10.063" @default.
• W2168840227 hasPublicationYear "2004" @default.
• W2168840227 type Work @default.
• W2168840227 sameAs 2168840227 @default.
• W2168840227 citedByCount "53" @default.
• W2168840227 countsByYear W21688402272012 @default.
• W2168840227 countsByYear W21688402272013 @default.
• W2168840227 countsByYear W21688402272014 @default.
• W2168840227 countsByYear W21688402272015 @default.
• W2168840227 countsByYear W21688402272016 @default.
• W2168840227 countsByYear W21688402272017 @default.
• W2168840227 countsByYear W21688402272018 @default.
• W2168840227 countsByYear W21688402272019 @default.
• W2168840227 countsByYear W21688402272020 @default.
• W2168840227 countsByYear W21688402272021 @default.
• W2168840227 countsByYear W21688402272022 @default.
• W2168840227 countsByYear W21688402272023 @default.
• W2168840227 crossrefType "journal-article" @default.
• W2168840227 hasAuthorship W2168840227A5005933841 @default.
• W2168840227 hasAuthorship W2168840227A5010430485 @default.
• W2168840227 hasAuthorship W2168840227A5019229508 @default.
• W2168840227 hasAuthorship W2168840227A5020934002 @default.
• W2168840227 hasAuthorship W2168840227A5032372352 @default.
• W2168840227 hasAuthorship W2168840227A5048270648 @default.
• W2168840227 hasAuthorship W2168840227A5056311398 @default.
• W2168840227 hasAuthorship W2168840227A5067617107 @default.
• W2168840227 hasConcept C111368507 @default.
• W2168840227 hasConcept C113196181 @default.
• W2168840227 hasConcept C127313418 @default.
• W2168840227 hasConcept C159985019 @default.
• W2168840227 hasConcept C160671074 @default.
• W2168840227 hasConcept C171250308 @default.
• W2168840227 hasConcept C178790620 @default.
• W2168840227 hasConcept C185592680 @default.
• W2168840227 hasConcept C19067145 @default.
• W2168840227 hasConcept C192191005 @default.
• W2168840227 hasConcept C192562407 @default.
• W2168840227 hasConcept C199289684 @default.
• W2168840227 hasConcept C199360897 @default.
• W2168840227 hasConcept C22423302 @default.
• W2168840227 hasConcept C2777289219 @default.
• W2168840227 hasConcept C2780547777 @default.
• W2168840227 hasConcept C2781285689 @default.
• W2168840227 hasConcept C37292000 @default.
• W2168840227 hasConcept C41008148 @default.
• W2168840227 hasConcept C43617362 @default.
• W2168840227 hasConcept C540031477 @default.
• W2168840227 hasConcept C547737533 @default.
• W2168840227 hasConcept C71987851 @default.
• W2168840227 hasConceptScore W2168840227C111368507 @default.
• W2168840227 hasConceptScore W2168840227C113196181 @default.
• W2168840227 hasConceptScore W2168840227C127313418 @default.
• W2168840227 hasConceptScore W2168840227C159985019 @default.
• W2168840227 hasConceptScore W2168840227C160671074 @default.
• W2168840227 hasConceptScore W2168840227C171250308 @default.
• W2168840227 hasConceptScore W2168840227C178790620 @default.
• W2168840227 hasConceptScore W2168840227C185592680 @default.
• W2168840227 hasConceptScore W2168840227C19067145 @default.
• W2168840227 hasConceptScore W2168840227C192191005 @default.
• W2168840227 hasConceptScore W2168840227C192562407 @default.
• W2168840227 hasConceptScore W2168840227C199289684 @default.
• W2168840227 hasConceptScore W2168840227C199360897 @default.
• W2168840227 hasConceptScore W2168840227C22423302 @default.
• W2168840227 hasConceptScore W2168840227C2777289219 @default.
• W2168840227 hasConceptScore W2168840227C2780547777 @default.
• W2168840227 hasConceptScore W2168840227C2781285689 @default.
• W2168840227 hasConceptScore W2168840227C37292000 @default.
• W2168840227 hasConceptScore W2168840227C41008148 @default.
• W2168840227 hasConceptScore W2168840227C43617362 @default.
• W2168840227 hasConceptScore W2168840227C540031477 @default.
• W2168840227 hasConceptScore W2168840227C547737533 @default.
• W2168840227 hasConceptScore W2168840227C71987851 @default.
• W2168840227 hasIssue "4-8" @default.
• W2168840227 hasLocation W21688402271 @default.
• W2168840227 hasOpenAccess W2168840227 @default.

• next