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- W2169062463 abstract "The fabrication of both n- and p-channel MOSFET's with the souce/drain regions elevated above the electrical channel is described. The realization of effective shallow junctions is demonstrated and the device properties are compared to those of conventional MOSFET's." @default.
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- W2169062463 date "1984-01-01" @default.
- W2169062463 modified "2023-09-24" @default.
- W2169062463 title "Elevated source/drain MOSFET" @default.
- W2169062463 doi "https://doi.org/10.1109/iedm.1984.190802" @default.
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