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• W2169254831 abstract "The density functional theory method is used to explore the mechanism of dissociative adsorption of silane (SiH 4 ) on the S A type stepped Si(100) surface. Two reaction paths are described that produce silyl (SiH 3 ) and hydrogen atom fragments adsorbed on the dimer bonds present on each terrace. It has been found that the initial stage of the dissociation of SiH 4 on the S A type stepped Si(100) surface shows similarity to the dissociation of SiH 4 on the flat Si(100) surface; SiH 3 and hydrogen fragments bond to the Si dimer atoms by following the first reaction path." @default.
• W2169254831 created "2016-06-24" @default.
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• W2169254831 date "2002-06-01" @default.
• W2169254831 modified "2023-10-18" @default.
• W2169254831 title "DECOMPOSITION OF SiH₄ ON THE S_A TYPE STEPPED Si(100) SURFACE" @default.
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• W2169254831 doi "https://doi.org/10.1142/s0218625x02003901" @default.
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