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- W2169472023 abstract "To move microsystems from research prototypes to an industrial market, CMP, the French multiproject wafer service, has adapted an existing commercial tool to the automated design of micromachined devices." @default.
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- W2169472023 date "1997-01-01" @default.
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- W2169472023 title "CAD tools for bridging microsystems and foundries" @default.
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- W2169472023 doi "https://doi.org/10.1109/54.587739" @default.
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