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• W2169491106 endingPage "901" @default.
• W2169491106 startingPage "895" @default.
• W2169491106 abstract "We have developed a robust, CMOS back end of the line (BEOL) compatible, wafer-scale device transfer, and interconnect method for batch fabricating systems on chip that are especially suitable for MEMS or VLSI-MEMS applications. We have applied this method to transfer arrays of 4096 free-standing cantilevers with good cantilever flatness control and high-density vertical electrical interconnects to the receiver wafer (typically CMOS). Such an array is used in a highly parallel, scanning-probe-based data-storage system, which we internally call millipede. A very high-integration density has been achieved, even for wafer-scale transfer, thanks to the interlocking nature of the interconnect structure, which provides easy alignment with an accuracy of 2 /spl mu/m. The typical integration density is 100 cantilevers/mm/sup 2/ and 300 electrical interconnects/mm/sup 2/. Note that only the cantilevers, not a chip with cantilevers, are transferred and, unlike flip-chip technology, our method preserves the device orientation, which is crucial for MEMS applications, where often the MEMS device should have access to its environment (in our case, the cantilever tips are in contact with the storage medium). After device transfer, the system is mechanically and electrically stable up to at least 500/spl deg/C, allowing post-transfer wafer processing." @default.
• W2169491106 created "2016-06-24" @default.
• W2169491106 creator A5034920866 @default.
• W2169491106 creator A5059377010 @default.
• W2169491106 creator A5067500711 @default.
• W2169491106 creator A5076461512 @default.
• W2169491106 creator A5082365196 @default.
• W2169491106 date "2004-12-01" @default.
• W2169491106 modified "2023-09-27" @default.
• W2169491106 title "Wafer-Scale Microdevice Transfer/Interconnect: Its Application in an AFM-Based Data-Storage System" @default.
• W2169491106 cites W1966935150 @default.
• W2169491106 cites W2056415244 @default.
• W2169491106 cites W2098473989 @default.
• W2169491106 cites W2116741649 @default.
• W2169491106 cites W2117859751 @default.
• W2169491106 cites W2118680250 @default.
• W2169491106 cites W2120962623 @default.
• W2169491106 cites W2128095867 @default.
• W2169491106 cites W2130720371 @default.
• W2169491106 cites W2136250940 @default.
• W2169491106 cites W2138195958 @default.
• W2169491106 cites W2141993139 @default.
• W2169491106 cites W2143915873 @default.
• W2169491106 cites W2154309229 @default.
• W2169491106 cites W2162869577 @default.
• W2169491106 cites W2171849451 @default.
• W2169491106 doi "https://doi.org/10.1109/jmems.2004.835769" @default.
• W2169491106 hasPublicationYear "2004" @default.
• W2169491106 type Work @default.
• W2169491106 sameAs 2169491106 @default.
• W2169491106 citedByCount "89" @default.
• W2169491106 countsByYear W21694911062012 @default.
• W2169491106 countsByYear W21694911062013 @default.
• W2169491106 countsByYear W21694911062014 @default.
• W2169491106 countsByYear W21694911062015 @default.
• W2169491106 countsByYear W21694911062016 @default.
• W2169491106 countsByYear W21694911062021 @default.
• W2169491106 countsByYear W21694911062022 @default.
• W2169491106 countsByYear W21694911062023 @default.
• W2169491106 crossrefType "journal-article" @default.
• W2169491106 hasAuthorship W2169491106A5034920866 @default.
• W2169491106 hasAuthorship W2169491106A5059377010 @default.
• W2169491106 hasAuthorship W2169491106A5067500711 @default.
• W2169491106 hasAuthorship W2169491106A5076461512 @default.
• W2169491106 hasAuthorship W2169491106A5082365196 @default.
• W2169491106 hasConcept C119599485 @default.
• W2169491106 hasConcept C123745756 @default.
• W2169491106 hasConcept C127413603 @default.
• W2169491106 hasConcept C141354745 @default.
• W2169491106 hasConcept C159985019 @default.
• W2169491106 hasConcept C160671074 @default.
• W2169491106 hasConcept C165005293 @default.
• W2169491106 hasConcept C171250308 @default.
• W2169491106 hasConcept C192562407 @default.
• W2169491106 hasConcept C24326235 @default.
• W2169491106 hasConcept C2776226143 @default.
• W2169491106 hasConcept C2778638305 @default.
• W2169491106 hasConcept C2779227376 @default.
• W2169491106 hasConcept C31258907 @default.
• W2169491106 hasConcept C37977207 @default.
• W2169491106 hasConcept C41008148 @default.
• W2169491106 hasConcept C46362747 @default.
• W2169491106 hasConcept C49040817 @default.
• W2169491106 hasConcept C68928338 @default.
• W2169491106 hasConcept C79072407 @default.
• W2169491106 hasConceptScore W2169491106C119599485 @default.
• W2169491106 hasConceptScore W2169491106C123745756 @default.
• W2169491106 hasConceptScore W2169491106C127413603 @default.
• W2169491106 hasConceptScore W2169491106C141354745 @default.
• W2169491106 hasConceptScore W2169491106C159985019 @default.
• W2169491106 hasConceptScore W2169491106C160671074 @default.
• W2169491106 hasConceptScore W2169491106C165005293 @default.
• W2169491106 hasConceptScore W2169491106C171250308 @default.
• W2169491106 hasConceptScore W2169491106C192562407 @default.
• W2169491106 hasConceptScore W2169491106C24326235 @default.
• W2169491106 hasConceptScore W2169491106C2776226143 @default.
• W2169491106 hasConceptScore W2169491106C2778638305 @default.
• W2169491106 hasConceptScore W2169491106C2779227376 @default.
• W2169491106 hasConceptScore W2169491106C31258907 @default.
• W2169491106 hasConceptScore W2169491106C37977207 @default.
• W2169491106 hasConceptScore W2169491106C41008148 @default.
• W2169491106 hasConceptScore W2169491106C46362747 @default.
• W2169491106 hasConceptScore W2169491106C49040817 @default.
• W2169491106 hasConceptScore W2169491106C68928338 @default.
• W2169491106 hasConceptScore W2169491106C79072407 @default.
• W2169491106 hasIssue "6" @default.
• W2169491106 hasLocation W21694911061 @default.
• W2169491106 hasOpenAccess W2169491106 @default.
• W2169491106 hasPrimaryLocation W21694911061 @default.
• W2169491106 hasRelatedWork W1968968791 @default.
• W2169491106 hasRelatedWork W2018540545 @default.
• W2169491106 hasRelatedWork W2041844773 @default.
• W2169491106 hasRelatedWork W2058250460 @default.
• W2169491106 hasRelatedWork W2066453554 @default.
• W2169491106 hasRelatedWork W2099977505 @default.
• W2169491106 hasRelatedWork W2141691829 @default.
• W2169491106 hasRelatedWork W2364707753 @default.
• W2169491106 hasRelatedWork W2540312267 @default.

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