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- W2169773089 abstract "The effect of thermal processing, that gave limited oxidation from annealing under N2 atmosphere, on multilayer porous silicon (P-Si) microcavities has been investigated. The reflectivity spectra were measured before and after thermal processing. The observation of multilayer samples by scanning electron microscopy has shown unexpected expansion and compression of P-Si layers. It is found that thermal processing not only changed the effective refractive indices of the individual porous layers but also roughened their respective interfaces." @default.
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- W2169773089 date "2000-11-01" @default.
- W2169773089 modified "2023-10-14" @default.
- W2169773089 title "The Effect of Thermal Processing on Multilayer Porous Silicon Microcavity" @default.
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- W2169773089 doi "https://doi.org/10.1002/1521-396x(200011)182:1<319::aid-pssa319>3.0.co;2-o" @default.
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