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- W2169828348 abstract "The change of the energy profile of the initially present HfSiO defects in nMOSFETs after Vth adjustment by As and Ar implantations is investigated. A fundamental correlation between the density of energetically deep traps and the initial Vth is revealed, suggesting that the negative bulk charge in HfSiO controls the Vth." @default.
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- W2169828348 date "2010-04-01" @default.
- W2169828348 modified "2023-10-01" @default.
- W2169828348 title "Correlation Between the $V_{rm th}$ Adjustment of nMOSFETs With HfSiO Gate Oxide and the Energy Profile of the Bulk Trap Density" @default.
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- W2169828348 doi "https://doi.org/10.1109/led.2010.2040063" @default.
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