Matches in SemOpenAlex for { <https://semopenalex.org/work/W2169876227> ?p ?o ?g. }
- W2169876227 endingPage "3676" @default.
- W2169876227 startingPage "3671" @default.
- W2169876227 abstract "Hydrogenated carbon nitride (a-CN:H films) were deposited on n-type (1 0 0) silicon substrates making use of dual direct current radio frequency plasma enhanced chemical vapor deposition (DC-RF-PECVD), at working pressure of 2–20 Pa, using a mixed gas of CH4 and N2 as the source gas. The growth rate, composition, bonding structure of the deposited films were characterized by means of XPS and FTIR, and the mechanical properties of the deposited films were investigated by nano-indentation test. It was found that the parameters for the DC-RF-PECVD process had significant effects on the growth rate, structure and properties of the deposited films. The growth rate of the deposited films increased at first with increasing deposition pressure, then saturated with further increase of the deposition pressure. The N/C ratio inside the deposited films increased with increasing working pressure except that it was as much as 0.50 at a working pressure of 5.0 Pa. The nano-hardness of the films decreased with increasing deposition pressure. CN radicals were remarkably formed in the deposited films at higher pressures, and their contents are related to the nitrogen concentrations in the deposited films." @default.
- W2169876227 created "2016-06-24" @default.
- W2169876227 creator A5030978586 @default.
- W2169876227 creator A5043111788 @default.
- W2169876227 creator A5071079144 @default.
- W2169876227 date "2005-12-01" @default.
- W2169876227 modified "2023-10-05" @default.
- W2169876227 title "Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD" @default.
- W2169876227 cites W133012107 @default.
- W2169876227 cites W1578608441 @default.
- W2169876227 cites W1622534972 @default.
- W2169876227 cites W1969351875 @default.
- W2169876227 cites W1976190519 @default.
- W2169876227 cites W1979719644 @default.
- W2169876227 cites W1985111385 @default.
- W2169876227 cites W1998282970 @default.
- W2169876227 cites W1999518957 @default.
- W2169876227 cites W2014482844 @default.
- W2169876227 cites W2017042569 @default.
- W2169876227 cites W2017369577 @default.
- W2169876227 cites W2018340588 @default.
- W2169876227 cites W2019757775 @default.
- W2169876227 cites W2026211767 @default.
- W2169876227 cites W2030821707 @default.
- W2169876227 cites W2033512877 @default.
- W2169876227 cites W2039712079 @default.
- W2169876227 cites W2044011633 @default.
- W2169876227 cites W2052698364 @default.
- W2169876227 cites W2052838976 @default.
- W2169876227 cites W2054223305 @default.
- W2169876227 cites W2055964694 @default.
- W2169876227 cites W2068305634 @default.
- W2169876227 cites W2075002143 @default.
- W2169876227 cites W2080358647 @default.
- W2169876227 cites W2081320859 @default.
- W2169876227 cites W2083228798 @default.
- W2169876227 cites W2087753690 @default.
- W2169876227 cites W2090343243 @default.
- W2169876227 cites W2092332261 @default.
- W2169876227 cites W2092476503 @default.
- W2169876227 cites W2095183611 @default.
- W2169876227 cites W2095327260 @default.
- W2169876227 cites W2169700696 @default.
- W2169876227 cites W4252936171 @default.
- W2169876227 cites W2017593077 @default.
- W2169876227 doi "https://doi.org/10.1016/j.jnoncrysol.2005.10.013" @default.
- W2169876227 hasPublicationYear "2005" @default.
- W2169876227 type Work @default.
- W2169876227 sameAs 2169876227 @default.
- W2169876227 citedByCount "22" @default.
- W2169876227 countsByYear W21698762272012 @default.
- W2169876227 countsByYear W21698762272014 @default.
- W2169876227 countsByYear W21698762272016 @default.
- W2169876227 countsByYear W21698762272018 @default.
- W2169876227 countsByYear W21698762272020 @default.
- W2169876227 countsByYear W21698762272021 @default.
- W2169876227 countsByYear W21698762272022 @default.
- W2169876227 countsByYear W21698762272023 @default.
- W2169876227 crossrefType "journal-article" @default.
- W2169876227 hasAuthorship W2169876227A5030978586 @default.
- W2169876227 hasAuthorship W2169876227A5043111788 @default.
- W2169876227 hasAuthorship W2169876227A5071079144 @default.
- W2169876227 hasConcept C113196181 @default.
- W2169876227 hasConcept C127413603 @default.
- W2169876227 hasConcept C151730666 @default.
- W2169876227 hasConcept C159985019 @default.
- W2169876227 hasConcept C161790260 @default.
- W2169876227 hasConcept C171250308 @default.
- W2169876227 hasConcept C175708663 @default.
- W2169876227 hasConcept C178790620 @default.
- W2169876227 hasConcept C185592680 @default.
- W2169876227 hasConcept C19067145 @default.
- W2169876227 hasConcept C191897082 @default.
- W2169876227 hasConcept C192562407 @default.
- W2169876227 hasConcept C194760766 @default.
- W2169876227 hasConcept C2777431650 @default.
- W2169876227 hasConcept C2777492770 @default.
- W2169876227 hasConcept C2779227376 @default.
- W2169876227 hasConcept C2816523 @default.
- W2169876227 hasConcept C38347018 @default.
- W2169876227 hasConcept C42360764 @default.
- W2169876227 hasConcept C544956773 @default.
- W2169876227 hasConcept C57410435 @default.
- W2169876227 hasConcept C64297162 @default.
- W2169876227 hasConcept C65165184 @default.
- W2169876227 hasConcept C75937256 @default.
- W2169876227 hasConcept C86803240 @default.
- W2169876227 hasConcept C87976508 @default.
- W2169876227 hasConceptScore W2169876227C113196181 @default.
- W2169876227 hasConceptScore W2169876227C127413603 @default.
- W2169876227 hasConceptScore W2169876227C151730666 @default.
- W2169876227 hasConceptScore W2169876227C159985019 @default.
- W2169876227 hasConceptScore W2169876227C161790260 @default.
- W2169876227 hasConceptScore W2169876227C171250308 @default.
- W2169876227 hasConceptScore W2169876227C175708663 @default.
- W2169876227 hasConceptScore W2169876227C178790620 @default.
- W2169876227 hasConceptScore W2169876227C185592680 @default.
- W2169876227 hasConceptScore W2169876227C19067145 @default.