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- W2170089568 abstract "Inductively coupled plasma (ICP) etching technique was applied to fabricate high power InP/InGaAsP buried-hetero structure laser diodes. Low internal losses of 6 cm/sup -1/ and internal quantum efficiencies of 83%, which resulted in high power of 290 mW output, were obtained under extremely fast mesa-etching with 1.2 /spl mu/m/min." @default.
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- W2170089568 date "2002-11-13" @default.
- W2170089568 modified "2023-09-23" @default.
- W2170089568 title "Low internal loss InP/InGaAsP laser diodes fabricated using inductively coupled plasma etching" @default.
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- W2170089568 doi "https://doi.org/10.1109/iciprm.2001.929053" @default.
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