Matches in SemOpenAlex for { <https://semopenalex.org/work/W2170297303> ?p ?o ?g. }
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- W2170297303 endingPage "526" @default.
- W2170297303 startingPage "522" @default.
- W2170297303 abstract "The susceptibility of microelectromechanical systems (MEMS) devices for stiction, treated with two different antistiction coatings, is investigated in ambient and ultralow-humidity environmental conditions. Wafer-level testing with a pull-in/pull-out voltage technique and a current compliant source was used to detect stiction on capped and uncapped wafers. Historically, the devices coated with a phenyl siloxane coating and capped in a dry nitrogen environment failed due to stiction at the wafer level with pull-in/pull-out tests as well as the packaged parts during tap testing. Although the uncapped devices did not show stiction at ambient humidity using the pull-in/pull-out detection technique, successive drops in the pull-out voltage were detected as the conditions of the test control chamber became drier. The sensitivity of the stiction performance to environment conditions was eliminated when the MEMS devices were coated in a fluorinated silane coating. The results are explained in terms of wetting angle and surface chemistry behavior of the coatings, resulting in improved hydrophobicity, thus mitigating adhesive capillary forces." @default.
- W2170297303 created "2016-06-24" @default.
- W2170297303 creator A5006316216 @default.
- W2170297303 creator A5049737468 @default.
- W2170297303 creator A5066988618 @default.
- W2170297303 date "2011-04-01" @default.
- W2170297303 modified "2023-09-26" @default.
- W2170297303 title "The Effect of Surface Chemistry on MEMS Stiction in an Ultralow-Humidity Environment" @default.
- W2170297303 cites W2000189153 @default.
- W2170297303 cites W2017893342 @default.
- W2170297303 cites W2025491656 @default.
- W2170297303 cites W2047678292 @default.
- W2170297303 cites W2065032851 @default.
- W2170297303 cites W2075123778 @default.
- W2170297303 cites W2102374119 @default.
- W2170297303 cites W2105661592 @default.
- W2170297303 cites W2119176654 @default.
- W2170297303 cites W4246237647 @default.
- W2170297303 doi "https://doi.org/10.1109/jmems.2010.2100029" @default.
- W2170297303 hasPublicationYear "2011" @default.
- W2170297303 type Work @default.
- W2170297303 sameAs 2170297303 @default.
- W2170297303 citedByCount "7" @default.
- W2170297303 countsByYear W21702973032012 @default.
- W2170297303 countsByYear W21702973032013 @default.
- W2170297303 countsByYear W21702973032015 @default.
- W2170297303 countsByYear W21702973032016 @default.
- W2170297303 countsByYear W21702973032023 @default.
- W2170297303 crossrefType "journal-article" @default.
- W2170297303 hasAuthorship W2170297303A5006316216 @default.
- W2170297303 hasAuthorship W2170297303A5049737468 @default.
- W2170297303 hasAuthorship W2170297303A5066988618 @default.
- W2170297303 hasConcept C110339231 @default.
- W2170297303 hasConcept C121332964 @default.
- W2170297303 hasConcept C134514944 @default.
- W2170297303 hasConcept C151420433 @default.
- W2170297303 hasConcept C159985019 @default.
- W2170297303 hasConcept C160671074 @default.
- W2170297303 hasConcept C192562407 @default.
- W2170297303 hasConcept C196806460 @default.
- W2170297303 hasConcept C2779227376 @default.
- W2170297303 hasConcept C2781448156 @default.
- W2170297303 hasConcept C37977207 @default.
- W2170297303 hasConcept C49040817 @default.
- W2170297303 hasConcept C68928338 @default.
- W2170297303 hasConcept C97355855 @default.
- W2170297303 hasConceptScore W2170297303C110339231 @default.
- W2170297303 hasConceptScore W2170297303C121332964 @default.
- W2170297303 hasConceptScore W2170297303C134514944 @default.
- W2170297303 hasConceptScore W2170297303C151420433 @default.
- W2170297303 hasConceptScore W2170297303C159985019 @default.
- W2170297303 hasConceptScore W2170297303C160671074 @default.
- W2170297303 hasConceptScore W2170297303C192562407 @default.
- W2170297303 hasConceptScore W2170297303C196806460 @default.
- W2170297303 hasConceptScore W2170297303C2779227376 @default.
- W2170297303 hasConceptScore W2170297303C2781448156 @default.
- W2170297303 hasConceptScore W2170297303C37977207 @default.
- W2170297303 hasConceptScore W2170297303C49040817 @default.
- W2170297303 hasConceptScore W2170297303C68928338 @default.
- W2170297303 hasConceptScore W2170297303C97355855 @default.
- W2170297303 hasIssue "2" @default.
- W2170297303 hasLocation W21702973031 @default.
- W2170297303 hasOpenAccess W2170297303 @default.
- W2170297303 hasPrimaryLocation W21702973031 @default.
- W2170297303 hasRelatedWork W1488416978 @default.
- W2170297303 hasRelatedWork W1963684115 @default.
- W2170297303 hasRelatedWork W1977095025 @default.
- W2170297303 hasRelatedWork W2062276134 @default.
- W2170297303 hasRelatedWork W2167517449 @default.
- W2170297303 hasRelatedWork W2348276551 @default.
- W2170297303 hasRelatedWork W2366970374 @default.
- W2170297303 hasRelatedWork W2793446430 @default.
- W2170297303 hasRelatedWork W4210873755 @default.
- W2170297303 hasRelatedWork W4239023021 @default.
- W2170297303 hasVolume "20" @default.
- W2170297303 isParatext "false" @default.
- W2170297303 isRetracted "false" @default.
- W2170297303 magId "2170297303" @default.
- W2170297303 workType "article" @default.