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• W2170367233 endingPage "1942" @default.
• W2170367233 startingPage "1935" @default.
• W2170367233 abstract "This paper reports the design, fabrication technology, post-CMOS micromachining and characterization of CMOS-silicon-on-insulator (SOI)-microelectromechanical system (MEMS) transistors. The thermally isolated micromachined CMOS-SOI-MEMS transistor reported here is designed for uncooled infrared (IR) sensing and is dubbed here as ldquoTMOS.rdquo The measured dc and noise electrical characteristics of the as-processed (virgin) transistor as well as those of the post-CMOS-MEMS-processed transistor (TMOS) are reported and compared. In particular, the threshold voltage temperature dependence and the temperature coefficient of current (TCC) at subthreshold are reported. The results indicate that the post-CMOS-MEMS processing does not degrade the performance of the transistors. The electrooptical performance of the TMOS is characterized and reported. With TCC on the order of 4%-10%, depending on the gate voltage, responsivity of 40 mA/W, noise equivalent power on the order of several tens of picowatts, and calculated noise equivalent temperature difference on the order of 64 mK, this uncooled IR sensor in standard CMOS-SOI technology may provide a high performance at a lower cost compared to state-of-the-art uncooled sensors based on bolometers implemented in non-CMOS materials like vanadium oxide or amorphous silicon." @default.
• W2170367233 created "2016-06-24" @default.
• W2170367233 creator A5002740371 @default.
• W2170367233 creator A5015908363 @default.
• W2170367233 creator A5036806139 @default.
• W2170367233 creator A5054282471 @default.
• W2170367233 creator A5065394299 @default.
• W2170367233 creator A5087985744 @default.
• W2170367233 date "2009-09-01" @default.
• W2170367233 modified "2023-10-16" @default.
• W2170367233 title "CMOS-SOI-MEMS Transistor for Uncooled IR Imaging" @default.
• W2170367233 cites W2004769250 @default.
• W2170367233 cites W2007990762 @default.
• W2170367233 cites W2063037331 @default.
• W2170367233 cites W2105386932 @default.
• W2170367233 cites W2123552221 @default.
• W2170367233 cites W2125144377 @default.
• W2170367233 cites W2130729641 @default.
• W2170367233 cites W2136289510 @default.
• W2170367233 cites W2147301393 @default.
• W2170367233 cites W2149979580 @default.
• W2170367233 cites W2157276237 @default.
• W2170367233 cites W2163966671 @default.
• W2170367233 cites W2543702172 @default.
• W2170367233 cites W574125501 @default.
• W2170367233 doi "https://doi.org/10.1109/ted.2009.2026523" @default.
• W2170367233 hasPublicationYear "2009" @default.
• W2170367233 type Work @default.
• W2170367233 sameAs 2170367233 @default.
• W2170367233 citedByCount "53" @default.
• W2170367233 countsByYear W21703672332012 @default.
• W2170367233 countsByYear W21703672332013 @default.
• W2170367233 countsByYear W21703672332014 @default.
• W2170367233 countsByYear W21703672332015 @default.
• W2170367233 countsByYear W21703672332016 @default.
• W2170367233 countsByYear W21703672332017 @default.
• W2170367233 countsByYear W21703672332018 @default.
• W2170367233 countsByYear W21703672332019 @default.
• W2170367233 countsByYear W21703672332020 @default.
• W2170367233 countsByYear W21703672332021 @default.
• W2170367233 countsByYear W21703672332022 @default.
• W2170367233 countsByYear W21703672332023 @default.
• W2170367233 crossrefType "journal-article" @default.
• W2170367233 hasAuthorship W2170367233A5002740371 @default.
• W2170367233 hasAuthorship W2170367233A5015908363 @default.
• W2170367233 hasAuthorship W2170367233A5036806139 @default.
• W2170367233 hasAuthorship W2170367233A5054282471 @default.
• W2170367233 hasAuthorship W2170367233A5065394299 @default.
• W2170367233 hasAuthorship W2170367233A5087985744 @default.
• W2170367233 hasConcept C119599485 @default.
• W2170367233 hasConcept C127413603 @default.
• W2170367233 hasConcept C136525101 @default.
• W2170367233 hasConcept C142724271 @default.
• W2170367233 hasConcept C145667562 @default.
• W2170367233 hasConcept C156465305 @default.
• W2170367233 hasConcept C165801399 @default.
• W2170367233 hasConcept C172385210 @default.
• W2170367233 hasConcept C178889773 @default.
• W2170367233 hasConcept C192562407 @default.
• W2170367233 hasConcept C204787440 @default.
• W2170367233 hasConcept C23125352 @default.
• W2170367233 hasConcept C27050352 @default.
• W2170367233 hasConcept C37977207 @default.
• W2170367233 hasConcept C46362747 @default.
• W2170367233 hasConcept C49040817 @default.
• W2170367233 hasConcept C53143962 @default.
• W2170367233 hasConcept C544956773 @default.
• W2170367233 hasConcept C71924100 @default.
• W2170367233 hasConceptScore W2170367233C119599485 @default.
• W2170367233 hasConceptScore W2170367233C127413603 @default.
• W2170367233 hasConceptScore W2170367233C136525101 @default.
• W2170367233 hasConceptScore W2170367233C142724271 @default.
• W2170367233 hasConceptScore W2170367233C145667562 @default.
• W2170367233 hasConceptScore W2170367233C156465305 @default.
• W2170367233 hasConceptScore W2170367233C165801399 @default.
• W2170367233 hasConceptScore W2170367233C172385210 @default.
• W2170367233 hasConceptScore W2170367233C178889773 @default.
• W2170367233 hasConceptScore W2170367233C192562407 @default.
• W2170367233 hasConceptScore W2170367233C204787440 @default.
• W2170367233 hasConceptScore W2170367233C23125352 @default.
• W2170367233 hasConceptScore W2170367233C27050352 @default.
• W2170367233 hasConceptScore W2170367233C37977207 @default.
• W2170367233 hasConceptScore W2170367233C46362747 @default.
• W2170367233 hasConceptScore W2170367233C49040817 @default.
• W2170367233 hasConceptScore W2170367233C53143962 @default.
• W2170367233 hasConceptScore W2170367233C544956773 @default.
• W2170367233 hasConceptScore W2170367233C71924100 @default.
• W2170367233 hasIssue "9" @default.
• W2170367233 hasLocation W21703672331 @default.
• W2170367233 hasOpenAccess W2170367233 @default.
• W2170367233 hasPrimaryLocation W21703672331 @default.
• W2170367233 hasRelatedWork W1977472676 @default.
• W2170367233 hasRelatedWork W2022641457 @default.
• W2170367233 hasRelatedWork W2046102502 @default.
• W2170367233 hasRelatedWork W2170091273 @default.
• W2170367233 hasRelatedWork W2170367233 @default.
• W2170367233 hasRelatedWork W2172276750 @default.
• W2170367233 hasRelatedWork W2271856295 @default.

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