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- W2170805158 abstract "We have deposited diamond-like carbon (DLC) films using RF magnetron sputtering techniques, and investigated structure, chemical bonding of deposited films and these thermal stabilities by Raman spectroscopy and photoelectron spectroscopy. It has been found that the film deposited under typical conditions is amorphous carbon (a-C) with 62% sp2 and 38% sp3 bonds. Ordering of a-C has been observed with an increase in substrate temperature during deposition and similarly observed after postannealing, although the sp3/sp2 ratio in a film does not change even at 900°C. The absence of conversion between sp3 and sp2 bonds indicates that the DLC films have high thermal stabilities." @default.
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- W2170805158 date "2003-06-15" @default.
- W2170805158 modified "2023-09-23" @default.
- W2170805158 title "Structure, Chemical Bonding and These Thermal Stabilities of Diamond-Like Carbon (DLC) Films by RF Magnetron Sputtering" @default.
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- W2170805158 doi "https://doi.org/10.1143/jjap.42.l676" @default.
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