FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2171234299> ?p ?o ?g. }

• W2171234299 abstract "In this study, we have developed Ti-based piezoelectric MEMS scanner mirrors driven by PZT thin films. The 2 μm-thick PZT thin films were directly deposited on 50 μm-thick Ti substrates by rf-magnetron sputtering. The Ti substrates were preliminary microfabricated into the shape of the scanner mirror by wet-etching, therefore we could fabricate piezoelectric micro-actuators without conventional photolithographic process. We fabricated horizontal MEMS scanner mirrors for laser scanner displays and achieved a large mechanical tilt angle of 10.0° at high resonant frequency of 23.7 kHz by low driving voltage of 10 V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>pp</sub> . The experimental results were consistent with the results of FEM simulation." @default.
• W2171234299 created "2016-06-24" @default.
• W2171234299 creator A5027742928 @default.
• W2171234299 creator A5029769892 @default.
• W2171234299 creator A5065666549 @default.
• W2171234299 creator A5085135396 @default.
• W2171234299 date "2011-06-01" @default.
• W2171234299 modified "2023-09-27" @default.
• W2171234299 title "Metal-based piezoelectric MEMS scanner mirrors composed of PZT thin films on titanium substrates" @default.
• W2171234299 cites W1773921663 @default.
• W2171234299 cites W1969364783 @default.
• W2171234299 cites W1997419472 @default.
• W2171234299 cites W2008934722 @default.
• W2171234299 cites W2038554669 @default.
• W2171234299 cites W2071491909 @default.
• W2171234299 cites W2110503560 @default.
• W2171234299 cites W2112872771 @default.
• W2171234299 cites W2146719344 @default.
• W2171234299 cites W4214912137 @default.
• W2171234299 doi "https://doi.org/10.1109/transducers.2011.5969718" @default.
• W2171234299 hasPublicationYear "2011" @default.
• W2171234299 type Work @default.
• W2171234299 sameAs 2171234299 @default.
• W2171234299 citedByCount "4" @default.
• W2171234299 countsByYear W21712342992012 @default.
• W2171234299 countsByYear W21712342992018 @default.
• W2171234299 countsByYear W21712342992023 @default.
• W2171234299 crossrefType "proceedings-article" @default.
• W2171234299 hasAuthorship W2171234299A5027742928 @default.
• W2171234299 hasAuthorship W2171234299A5029769892 @default.
• W2171234299 hasAuthorship W2171234299A5065666549 @default.
• W2171234299 hasAuthorship W2171234299A5085135396 @default.
• W2171234299 hasConcept C100082104 @default.
• W2171234299 hasConcept C100460472 @default.
• W2171234299 hasConcept C120665830 @default.
• W2171234299 hasConcept C121332964 @default.
• W2171234299 hasConcept C127413603 @default.
• W2171234299 hasConcept C136525101 @default.
• W2171234299 hasConcept C141349535 @default.
• W2171234299 hasConcept C142724271 @default.
• W2171234299 hasConcept C159985019 @default.
• W2171234299 hasConcept C171250308 @default.
• W2171234299 hasConcept C19067145 @default.
• W2171234299 hasConcept C191897082 @default.
• W2171234299 hasConcept C192562407 @default.
• W2171234299 hasConcept C204787440 @default.
• W2171234299 hasConcept C22423302 @default.
• W2171234299 hasConcept C2779227376 @default.
• W2171234299 hasConcept C2779751349 @default.
• W2171234299 hasConcept C2779844322 @default.
• W2171234299 hasConcept C37977207 @default.
• W2171234299 hasConcept C49040817 @default.
• W2171234299 hasConcept C506065880 @default.
• W2171234299 hasConcept C520434653 @default.
• W2171234299 hasConcept C527607 @default.
• W2171234299 hasConcept C61427134 @default.
• W2171234299 hasConcept C71924100 @default.
• W2171234299 hasConcept C78519656 @default.
• W2171234299 hasConceptScore W2171234299C100082104 @default.
• W2171234299 hasConceptScore W2171234299C100460472 @default.
• W2171234299 hasConceptScore W2171234299C120665830 @default.
• W2171234299 hasConceptScore W2171234299C121332964 @default.
• W2171234299 hasConceptScore W2171234299C127413603 @default.
• W2171234299 hasConceptScore W2171234299C136525101 @default.
• W2171234299 hasConceptScore W2171234299C141349535 @default.
• W2171234299 hasConceptScore W2171234299C142724271 @default.
• W2171234299 hasConceptScore W2171234299C159985019 @default.
• W2171234299 hasConceptScore W2171234299C171250308 @default.
• W2171234299 hasConceptScore W2171234299C19067145 @default.
• W2171234299 hasConceptScore W2171234299C191897082 @default.
• W2171234299 hasConceptScore W2171234299C192562407 @default.
• W2171234299 hasConceptScore W2171234299C204787440 @default.
• W2171234299 hasConceptScore W2171234299C22423302 @default.
• W2171234299 hasConceptScore W2171234299C2779227376 @default.
• W2171234299 hasConceptScore W2171234299C2779751349 @default.
• W2171234299 hasConceptScore W2171234299C2779844322 @default.
• W2171234299 hasConceptScore W2171234299C37977207 @default.
• W2171234299 hasConceptScore W2171234299C49040817 @default.
• W2171234299 hasConceptScore W2171234299C506065880 @default.
• W2171234299 hasConceptScore W2171234299C520434653 @default.
• W2171234299 hasConceptScore W2171234299C527607 @default.
• W2171234299 hasConceptScore W2171234299C61427134 @default.
• W2171234299 hasConceptScore W2171234299C71924100 @default.
• W2171234299 hasConceptScore W2171234299C78519656 @default.
• W2171234299 hasLocation W21712342991 @default.
• W2171234299 hasOpenAccess W2171234299 @default.
• W2171234299 hasPrimaryLocation W21712342991 @default.
• W2171234299 hasRelatedWork W2018773005 @default.
• W2171234299 hasRelatedWork W2159138826 @default.
• W2171234299 hasRelatedWork W2170431626 @default.
• W2171234299 hasRelatedWork W2171234299 @default.
• W2171234299 hasRelatedWork W2316948141 @default.
• W2171234299 hasRelatedWork W2580267676 @default.
• W2171234299 hasRelatedWork W2617606432 @default.
• W2171234299 hasRelatedWork W2942986666 @default.
• W2171234299 hasRelatedWork W4318185124 @default.
• W2171234299 hasRelatedWork W605914418 @default.
• W2171234299 isParatext "false" @default.
• W2171234299 isRetracted "false" @default.
• W2171234299 magId "2171234299" @default.

• next