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- W2171256210 abstract "We fabricated thin film thermocouples (TFTCs) to measure temperature distributions at the micro-scale. Nickel film was deposited as the first thermocouple material. Silicon dioxide was then deposited on the Ni film as an insulator. To make the thermocouple junctions, micro-holes were opened by focused ion beam (FIB), and tungsten film was patterned on the insulator as the. second thermocouple material. The thermocouple junctions were 0.5 /spl mu/m across. We also fabricated a micro-heater near the micro-TFTCs. The heat flux from the micro-heater was estimated by measuring the applied electric power. By using this micro-heater we calibrated the micro-TFTCs without using other thermocouples. With this setup, we have measured temperature distributions with 10 /spl mu/m spatial resolution, which is finer than that of an IR-microscope." @default.
- W2171256210 created "2016-06-24" @default.
- W2171256210 creator A5023749170 @default.
- W2171256210 creator A5027440746 @default.
- W2171256210 creator A5056889151 @default.
- W2171256210 date "2004-05-06" @default.
- W2171256210 modified "2023-09-27" @default.
- W2171256210 title "Fabrication of micro-thin film thermocouples" @default.
- W2171256210 cites W1988306614 @default.
- W2171256210 cites W2028806130 @default.
- W2171256210 cites W2032626474 @default.
- W2171256210 cites W2034831534 @default.
- W2171256210 cites W2057567599 @default.
- W2171256210 cites W2068192014 @default.
- W2171256210 cites W2069200279 @default.
- W2171256210 cites W2085680708 @default.
- W2171256210 cites W2092860205 @default.
- W2171256210 cites W389868541 @default.
- W2171256210 doi "https://doi.org/10.1109/ict.2003.1287602" @default.
- W2171256210 hasPublicationYear "2004" @default.
- W2171256210 type Work @default.
- W2171256210 sameAs 2171256210 @default.
- W2171256210 citedByCount "2" @default.
- W2171256210 countsByYear W21712562102014 @default.
- W2171256210 crossrefType "proceedings-article" @default.
- W2171256210 hasAuthorship W2171256210A5023749170 @default.
- W2171256210 hasAuthorship W2171256210A5027440746 @default.
- W2171256210 hasAuthorship W2171256210A5056889151 @default.
- W2171256210 hasConcept C120665830 @default.
- W2171256210 hasConcept C121332964 @default.
- W2171256210 hasConcept C136525101 @default.
- W2171256210 hasConcept C142724271 @default.
- W2171256210 hasConcept C159985019 @default.
- W2171256210 hasConcept C168068576 @default.
- W2171256210 hasConcept C171250308 @default.
- W2171256210 hasConcept C19067145 @default.
- W2171256210 hasConcept C191897082 @default.
- W2171256210 hasConcept C192562407 @default.
- W2171256210 hasConcept C204787440 @default.
- W2171256210 hasConcept C212702 @default.
- W2171256210 hasConcept C49040817 @default.
- W2171256210 hasConcept C53143962 @default.
- W2171256210 hasConcept C542268612 @default.
- W2171256210 hasConcept C544956773 @default.
- W2171256210 hasConcept C62520636 @default.
- W2171256210 hasConcept C71924100 @default.
- W2171256210 hasConcept C72293138 @default.
- W2171256210 hasConceptScore W2171256210C120665830 @default.
- W2171256210 hasConceptScore W2171256210C121332964 @default.
- W2171256210 hasConceptScore W2171256210C136525101 @default.
- W2171256210 hasConceptScore W2171256210C142724271 @default.
- W2171256210 hasConceptScore W2171256210C159985019 @default.
- W2171256210 hasConceptScore W2171256210C168068576 @default.
- W2171256210 hasConceptScore W2171256210C171250308 @default.
- W2171256210 hasConceptScore W2171256210C19067145 @default.
- W2171256210 hasConceptScore W2171256210C191897082 @default.
- W2171256210 hasConceptScore W2171256210C192562407 @default.
- W2171256210 hasConceptScore W2171256210C204787440 @default.
- W2171256210 hasConceptScore W2171256210C212702 @default.
- W2171256210 hasConceptScore W2171256210C49040817 @default.
- W2171256210 hasConceptScore W2171256210C53143962 @default.
- W2171256210 hasConceptScore W2171256210C542268612 @default.
- W2171256210 hasConceptScore W2171256210C544956773 @default.
- W2171256210 hasConceptScore W2171256210C62520636 @default.
- W2171256210 hasConceptScore W2171256210C71924100 @default.
- W2171256210 hasConceptScore W2171256210C72293138 @default.
- W2171256210 hasLocation W21712562101 @default.
- W2171256210 hasOpenAccess W2171256210 @default.
- W2171256210 hasPrimaryLocation W21712562101 @default.
- W2171256210 hasRelatedWork W1965709820 @default.
- W2171256210 hasRelatedWork W1984274279 @default.
- W2171256210 hasRelatedWork W2002012698 @default.
- W2171256210 hasRelatedWork W2051619501 @default.
- W2171256210 hasRelatedWork W2058214359 @default.
- W2171256210 hasRelatedWork W2064992390 @default.
- W2171256210 hasRelatedWork W2071509278 @default.
- W2171256210 hasRelatedWork W2074387781 @default.
- W2171256210 hasRelatedWork W2084618985 @default.
- W2171256210 hasRelatedWork W2096027898 @default.
- W2171256210 hasRelatedWork W2137936401 @default.
- W2171256210 hasRelatedWork W2173551697 @default.
- W2171256210 hasRelatedWork W2520522457 @default.
- W2171256210 hasRelatedWork W3146300377 @default.
- W2171256210 hasRelatedWork W2101660301 @default.
- W2171256210 hasRelatedWork W2594634030 @default.
- W2171256210 hasRelatedWork W2838113187 @default.
- W2171256210 hasRelatedWork W2850253568 @default.
- W2171256210 hasRelatedWork W2855102692 @default.
- W2171256210 hasRelatedWork W2940585846 @default.
- W2171256210 isParatext "false" @default.
- W2171256210 isRetracted "false" @default.
- W2171256210 magId "2171256210" @default.
- W2171256210 workType "article" @default.