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- W2171651561 abstract "A novel methodology for digital measuring procedures and digital data analysis is presented in order to evaluate an online process control and defect monitoring. That can be done by manufacturing test chips side by side with standard chips and measuring them with the same measuring equipment-the digital tester. To achieve a fast and effective (efficient) measuring procedure and data analysis test structures will be modeled in geometry-graphs, neighborhood-graphs and connection-graphs. >" @default.
- W2171651561 created "2016-06-24" @default.
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- W2171651561 date "2002-12-17" @default.
- W2171651561 modified "2023-09-25" @default.
- W2171651561 title "Modeling of test structures for efficient online defect monitoring using a digital tester" @default.
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- W2171651561 doi "https://doi.org/10.1109/icmts.1994.303493" @default.
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