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- W2171707514 abstract "This paper presents a capacitive micromachined accelerometer with a comb-finger and cantilever beam structure. The principle of operation of the accelerometer, open-loop performance and closed-loop performance are introduced. A comparison between FEA and theoretical analysis is given, and the result is in good agreement with the prediction. Based the simulation result, the sensor behavior strongly depend on various design parameters. The desired performance parameters, displacement sensitivity and resolution can be obtained by adjusting the structure. The beam design optimization is performed, and the optimized design parameters are achieved, including beam length 500um, beam width 600um, and beam thickness 6um." @default.
- W2171707514 created "2016-06-24" @default.
- W2171707514 creator A5026070941 @default.
- W2171707514 creator A5029030838 @default.
- W2171707514 creator A5062841020 @default.
- W2171707514 date "2010-08-01" @default.
- W2171707514 modified "2023-09-27" @default.
- W2171707514 title "Optimization design of a capacitive microaccelerometer" @default.
- W2171707514 cites W1595396794 @default.
- W2171707514 cites W1854974761 @default.
- W2171707514 cites W2039739991 @default.
- W2171707514 doi "https://doi.org/10.1109/icma.2010.5588204" @default.
- W2171707514 hasPublicationYear "2010" @default.
- W2171707514 type Work @default.
- W2171707514 sameAs 2171707514 @default.
- W2171707514 citedByCount "1" @default.
- W2171707514 countsByYear W21717075142021 @default.
- W2171707514 crossrefType "proceedings-article" @default.
- W2171707514 hasAuthorship W2171707514A5026070941 @default.
- W2171707514 hasAuthorship W2171707514A5029030838 @default.
- W2171707514 hasAuthorship W2171707514A5062841020 @default.
- W2171707514 hasConcept C107551265 @default.
- W2171707514 hasConcept C111919701 @default.
- W2171707514 hasConcept C119599485 @default.
- W2171707514 hasConcept C121332964 @default.
- W2171707514 hasConcept C127413603 @default.
- W2171707514 hasConcept C135628077 @default.
- W2171707514 hasConcept C141354745 @default.
- W2171707514 hasConcept C15744967 @default.
- W2171707514 hasConcept C168834538 @default.
- W2171707514 hasConcept C192562407 @default.
- W2171707514 hasConcept C206755178 @default.
- W2171707514 hasConcept C21200559 @default.
- W2171707514 hasConcept C24326235 @default.
- W2171707514 hasConcept C24890656 @default.
- W2171707514 hasConcept C41008148 @default.
- W2171707514 hasConcept C542102704 @default.
- W2171707514 hasConcept C66938386 @default.
- W2171707514 hasConcept C89805583 @default.
- W2171707514 hasConceptScore W2171707514C107551265 @default.
- W2171707514 hasConceptScore W2171707514C111919701 @default.
- W2171707514 hasConceptScore W2171707514C119599485 @default.
- W2171707514 hasConceptScore W2171707514C121332964 @default.
- W2171707514 hasConceptScore W2171707514C127413603 @default.
- W2171707514 hasConceptScore W2171707514C135628077 @default.
- W2171707514 hasConceptScore W2171707514C141354745 @default.
- W2171707514 hasConceptScore W2171707514C15744967 @default.
- W2171707514 hasConceptScore W2171707514C168834538 @default.
- W2171707514 hasConceptScore W2171707514C192562407 @default.
- W2171707514 hasConceptScore W2171707514C206755178 @default.
- W2171707514 hasConceptScore W2171707514C21200559 @default.
- W2171707514 hasConceptScore W2171707514C24326235 @default.
- W2171707514 hasConceptScore W2171707514C24890656 @default.
- W2171707514 hasConceptScore W2171707514C41008148 @default.
- W2171707514 hasConceptScore W2171707514C542102704 @default.
- W2171707514 hasConceptScore W2171707514C66938386 @default.
- W2171707514 hasConceptScore W2171707514C89805583 @default.
- W2171707514 hasLocation W21717075141 @default.
- W2171707514 hasOpenAccess W2171707514 @default.
- W2171707514 hasPrimaryLocation W21717075141 @default.
- W2171707514 hasRelatedWork W1976468907 @default.
- W2171707514 hasRelatedWork W1997247928 @default.
- W2171707514 hasRelatedWork W1998975915 @default.
- W2171707514 hasRelatedWork W2020264161 @default.
- W2171707514 hasRelatedWork W2043971612 @default.
- W2171707514 hasRelatedWork W205468864 @default.
- W2171707514 hasRelatedWork W2058867004 @default.
- W2171707514 hasRelatedWork W2065126658 @default.
- W2171707514 hasRelatedWork W2091152586 @default.
- W2171707514 hasRelatedWork W2100701172 @default.
- W2171707514 hasRelatedWork W2106015092 @default.
- W2171707514 hasRelatedWork W2109299670 @default.
- W2171707514 hasRelatedWork W2119494337 @default.
- W2171707514 hasRelatedWork W2136734327 @default.
- W2171707514 hasRelatedWork W2149207200 @default.
- W2171707514 hasRelatedWork W2172130876 @default.
- W2171707514 hasRelatedWork W2350735367 @default.
- W2171707514 hasRelatedWork W2377046271 @default.
- W2171707514 hasRelatedWork W2546700375 @default.
- W2171707514 hasRelatedWork W68938366 @default.
- W2171707514 isParatext "false" @default.
- W2171707514 isRetracted "false" @default.
- W2171707514 magId "2171707514" @default.
- W2171707514 workType "article" @default.