Matches in SemOpenAlex for { <https://semopenalex.org/work/W2171808351> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2171808351 abstract "A micro silicon cantilever actuated by ZnO thin film was designed, fabricated and characterized. The ZnO thin film was deposited by RF sputtering at room temperature. The transverse piezoelectric constant d 31 was found to be-4.66 pC/N. Time and frequency responses of the cantilever actuator were investigated by means of a laser Doppler vibrometer. The actuator has a sensitivity of 12 nm/V at 15 kHz. Its 1 st bending resonance was observed at 53 kHz. The bandwidth was found to be 27 kHz with damping of 0.35%. The cantilever demonstrated capability of high frequency actuation on a nanometer level." @default.
- W2171808351 created "2016-06-24" @default.
- W2171808351 creator A5023509400 @default.
- W2171808351 creator A5028716796 @default.
- W2171808351 creator A5044653389 @default.
- W2171808351 date "2012-03-01" @default.
- W2171808351 modified "2023-09-25" @default.
- W2171808351 title "A ZnO Driven Silicon Cantilever for Nanoscale Actuation" @default.
- W2171808351 cites W1977421569 @default.
- W2171808351 cites W2030663413 @default.
- W2171808351 cites W2097511512 @default.
- W2171808351 cites W2147516154 @default.
- W2171808351 doi "https://doi.org/10.4028/www.scientific.net/amr.486.23" @default.
- W2171808351 hasPublicationYear "2012" @default.
- W2171808351 type Work @default.
- W2171808351 sameAs 2171808351 @default.
- W2171808351 citedByCount "0" @default.
- W2171808351 crossrefType "journal-article" @default.
- W2171808351 hasAuthorship W2171808351A5023509400 @default.
- W2171808351 hasAuthorship W2171808351A5028716796 @default.
- W2171808351 hasAuthorship W2171808351A5044653389 @default.
- W2171808351 hasConcept C100082104 @default.
- W2171808351 hasConcept C119599485 @default.
- W2171808351 hasConcept C127413603 @default.
- W2171808351 hasConcept C141354745 @default.
- W2171808351 hasConcept C159985019 @default.
- W2171808351 hasConcept C171250308 @default.
- W2171808351 hasConcept C172707124 @default.
- W2171808351 hasConcept C19067145 @default.
- W2171808351 hasConcept C192562407 @default.
- W2171808351 hasConcept C22423302 @default.
- W2171808351 hasConcept C45206210 @default.
- W2171808351 hasConcept C49040817 @default.
- W2171808351 hasConcept C544956773 @default.
- W2171808351 hasConcept C6260449 @default.
- W2171808351 hasConcept C77066764 @default.
- W2171808351 hasConcept C87210426 @default.
- W2171808351 hasConcept C927094 @default.
- W2171808351 hasConcept C96199931 @default.
- W2171808351 hasConceptScore W2171808351C100082104 @default.
- W2171808351 hasConceptScore W2171808351C119599485 @default.
- W2171808351 hasConceptScore W2171808351C127413603 @default.
- W2171808351 hasConceptScore W2171808351C141354745 @default.
- W2171808351 hasConceptScore W2171808351C159985019 @default.
- W2171808351 hasConceptScore W2171808351C171250308 @default.
- W2171808351 hasConceptScore W2171808351C172707124 @default.
- W2171808351 hasConceptScore W2171808351C19067145 @default.
- W2171808351 hasConceptScore W2171808351C192562407 @default.
- W2171808351 hasConceptScore W2171808351C22423302 @default.
- W2171808351 hasConceptScore W2171808351C45206210 @default.
- W2171808351 hasConceptScore W2171808351C49040817 @default.
- W2171808351 hasConceptScore W2171808351C544956773 @default.
- W2171808351 hasConceptScore W2171808351C6260449 @default.
- W2171808351 hasConceptScore W2171808351C77066764 @default.
- W2171808351 hasConceptScore W2171808351C87210426 @default.
- W2171808351 hasConceptScore W2171808351C927094 @default.
- W2171808351 hasConceptScore W2171808351C96199931 @default.
- W2171808351 hasLocation W21718083511 @default.
- W2171808351 hasOpenAccess W2171808351 @default.
- W2171808351 hasPrimaryLocation W21718083511 @default.
- W2171808351 hasRelatedWork W1975269980 @default.
- W2171808351 hasRelatedWork W1981769685 @default.
- W2171808351 hasRelatedWork W1981973588 @default.
- W2171808351 hasRelatedWork W2038101585 @default.
- W2171808351 hasRelatedWork W2041838314 @default.
- W2171808351 hasRelatedWork W2047652035 @default.
- W2171808351 hasRelatedWork W2051833861 @default.
- W2171808351 hasRelatedWork W2063937924 @default.
- W2171808351 hasRelatedWork W2065737112 @default.
- W2171808351 hasRelatedWork W2071982434 @default.
- W2171808351 hasRelatedWork W2072388733 @default.
- W2171808351 hasRelatedWork W2076608431 @default.
- W2171808351 hasRelatedWork W2086114945 @default.
- W2171808351 hasRelatedWork W2094839937 @default.
- W2171808351 hasRelatedWork W2110748603 @default.
- W2171808351 hasRelatedWork W2218106709 @default.
- W2171808351 hasRelatedWork W2942102366 @default.
- W2171808351 hasRelatedWork W2976793652 @default.
- W2171808351 hasRelatedWork W3180623886 @default.
- W2171808351 hasRelatedWork W814338137 @default.
- W2171808351 isParatext "false" @default.
- W2171808351 isRetracted "false" @default.
- W2171808351 magId "2171808351" @default.
- W2171808351 workType "article" @default.