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- W2171859074 abstract "Analytic solutions for two-dimensional diffused profiles are obtained for a drive-in in an inert ambient and in an oxidizing ambient. For both cases, the impurity profiles have the same lateral dependence. An experiment which extracts the surface impurity profile near a diffusion mask edge is described. Test structures for this purpose have been fabricated using a CMOS process." @default.
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- W2171859074 date "1978-08-01" @default.
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- W2171859074 title "Modelling and measurement of surface impurity profiles of laterally diffused regions" @default.
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- W2171859074 doi "https://doi.org/10.1109/jssc.1978.1051076" @default.
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