Matches in SemOpenAlex for { <https://semopenalex.org/work/W2172051277> ?p ?o ?g. }
- W2172051277 endingPage "110" @default.
- W2172051277 startingPage "104" @default.
- W2172051277 abstract "Abstract Hematite ( α ‐Fe 2 O 3 ) thin films are obtained by atomic layer deposition (ALD) in the temperature range 200 − 350°C using ferrocene and ozone as the precursors. A micro‐pulse process facilitates the precursor adsorption and shortens the ferrocene dose time to 5 s. When tested on Si(100) substrates, the growth rate is around 0.5 Å per cycle for the first 300 cycles, after which the growth becomes nonlinear. Interestingly, a linear growth can be maintained with a rate of ≈0.55 Å per cycle by TiO 2 co‐deposition (cycle ratio of TiO 2 /Fe 2 O 3 = 1:20). Characterizations by X‐ray photoemission spectroscopy (XPS), Raman spectroscopy (RS), and UV‐vis absorption confirm the presence of the α ‐Fe 2 O 3 phase after post‐deposition annealing. Uniform depositions on dense ZnO nanorod arrays and anodic aluminum oxide (AAO) templates are also demonstrated, inferring that the current process is capable of coating on high (>50) aspect ratio structures." @default.
- W2172051277 created "2016-06-24" @default.
- W2172051277 creator A5015059832 @default.
- W2172051277 creator A5027308778 @default.
- W2172051277 creator A5044267574 @default.
- W2172051277 date "2013-05-16" @default.
- W2172051277 modified "2023-09-24" @default.
- W2172051277 title "A Micro‐pulse Process of Atomic Layer Deposition of Iron Oxide Using Ferrocene and Ozone Precursors and Ti‐Doping" @default.
- W2172051277 cites W135255352 @default.
- W2172051277 cites W1972713274 @default.
- W2172051277 cites W1974621104 @default.
- W2172051277 cites W1976555219 @default.
- W2172051277 cites W1978249403 @default.
- W2172051277 cites W1994495097 @default.
- W2172051277 cites W1999248315 @default.
- W2172051277 cites W2004367390 @default.
- W2172051277 cites W2008474686 @default.
- W2172051277 cites W2014994966 @default.
- W2172051277 cites W2015856769 @default.
- W2172051277 cites W2016044362 @default.
- W2172051277 cites W2018840602 @default.
- W2172051277 cites W2021752987 @default.
- W2172051277 cites W2027213355 @default.
- W2172051277 cites W2049537476 @default.
- W2172051277 cites W2053589001 @default.
- W2172051277 cites W2060410135 @default.
- W2172051277 cites W2067174536 @default.
- W2172051277 cites W2074739846 @default.
- W2172051277 cites W2081738501 @default.
- W2172051277 cites W2082002999 @default.
- W2172051277 cites W2122271644 @default.
- W2172051277 cites W2141854536 @default.
- W2172051277 cites W2149032507 @default.
- W2172051277 cites W2151269714 @default.
- W2172051277 cites W2169015358 @default.
- W2172051277 cites W2326264139 @default.
- W2172051277 cites W2330501807 @default.
- W2172051277 cites W2334319850 @default.
- W2172051277 cites W2950884518 @default.
- W2172051277 doi "https://doi.org/10.1002/cvde.201207030" @default.
- W2172051277 hasPublicationYear "2013" @default.
- W2172051277 type Work @default.
- W2172051277 sameAs 2172051277 @default.
- W2172051277 citedByCount "27" @default.
- W2172051277 countsByYear W21720512772013 @default.
- W2172051277 countsByYear W21720512772014 @default.
- W2172051277 countsByYear W21720512772015 @default.
- W2172051277 countsByYear W21720512772016 @default.
- W2172051277 countsByYear W21720512772017 @default.
- W2172051277 countsByYear W21720512772018 @default.
- W2172051277 countsByYear W21720512772019 @default.
- W2172051277 countsByYear W21720512772020 @default.
- W2172051277 countsByYear W21720512772021 @default.
- W2172051277 countsByYear W21720512772022 @default.
- W2172051277 crossrefType "journal-article" @default.
- W2172051277 hasAuthorship W2172051277A5015059832 @default.
- W2172051277 hasAuthorship W2172051277A5027308778 @default.
- W2172051277 hasAuthorship W2172051277A5044267574 @default.
- W2172051277 hasConcept C113196181 @default.
- W2172051277 hasConcept C120665830 @default.
- W2172051277 hasConcept C121332964 @default.
- W2172051277 hasConcept C126201875 @default.
- W2172051277 hasConcept C127413603 @default.
- W2172051277 hasConcept C147789679 @default.
- W2172051277 hasConcept C171250308 @default.
- W2172051277 hasConcept C17525397 @default.
- W2172051277 hasConcept C175708663 @default.
- W2172051277 hasConcept C179104552 @default.
- W2172051277 hasConcept C185592680 @default.
- W2172051277 hasConcept C19067145 @default.
- W2172051277 hasConcept C191897082 @default.
- W2172051277 hasConcept C192562407 @default.
- W2172051277 hasConcept C2777237805 @default.
- W2172051277 hasConcept C2777855556 @default.
- W2172051277 hasConcept C2779131772 @default.
- W2172051277 hasConcept C2779851234 @default.
- W2172051277 hasConcept C37982897 @default.
- W2172051277 hasConcept C40003534 @default.
- W2172051277 hasConcept C42360764 @default.
- W2172051277 hasConcept C43617362 @default.
- W2172051277 hasConcept C49040817 @default.
- W2172051277 hasConcept C52859227 @default.
- W2172051277 hasConcept C57863236 @default.
- W2172051277 hasConcept C69544855 @default.
- W2172051277 hasConceptScore W2172051277C113196181 @default.
- W2172051277 hasConceptScore W2172051277C120665830 @default.
- W2172051277 hasConceptScore W2172051277C121332964 @default.
- W2172051277 hasConceptScore W2172051277C126201875 @default.
- W2172051277 hasConceptScore W2172051277C127413603 @default.
- W2172051277 hasConceptScore W2172051277C147789679 @default.
- W2172051277 hasConceptScore W2172051277C171250308 @default.
- W2172051277 hasConceptScore W2172051277C17525397 @default.
- W2172051277 hasConceptScore W2172051277C175708663 @default.
- W2172051277 hasConceptScore W2172051277C179104552 @default.
- W2172051277 hasConceptScore W2172051277C185592680 @default.
- W2172051277 hasConceptScore W2172051277C19067145 @default.
- W2172051277 hasConceptScore W2172051277C191897082 @default.
- W2172051277 hasConceptScore W2172051277C192562407 @default.