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- W2172248543 abstract "In this study, we fabricated TFTs using ZnO thin film as the channel layer and Al 2 O 3 as the gate insulator deposited by plasma assisted ALD (PA-ALD) for low-temperature fabrication process. The PA-ALD ZnO TFTs with PA-ALD AL 2 O 3 gate insulator exhibit the excellent TFT device performances without annealing. Through this study, we found that the residual carrier concentration is reduced and the high performance ZnO TFTs are possible to obtain by using PA-ALD at low temperature." @default.
- W2172248543 created "2016-06-24" @default.
- W2172248543 creator A5022243056 @default.
- W2172248543 creator A5022411891 @default.
- W2172248543 creator A5054867796 @default.
- W2172248543 creator A5079384895 @default.
- W2172248543 creator A5085914124 @default.
- W2172248543 date "2011-05-01" @default.
- W2172248543 modified "2023-09-26" @default.
- W2172248543 title "Low temperature processed ZnO thin film transistors fabricated by plasma assisted atomic layer deposition" @default.
- W2172248543 cites W1967652077 @default.
- W2172248543 cites W1976250511 @default.
- W2172248543 cites W2147665778 @default.
- W2172248543 cites W2153690855 @default.
- W2172248543 cites W574681328 @default.
- W2172248543 doi "https://doi.org/10.1109/imfedk.2011.5944856" @default.
- W2172248543 hasPublicationYear "2011" @default.
- W2172248543 type Work @default.
- W2172248543 sameAs 2172248543 @default.
- W2172248543 citedByCount "0" @default.
- W2172248543 crossrefType "proceedings-article" @default.
- W2172248543 hasAuthorship W2172248543A5022243056 @default.
- W2172248543 hasAuthorship W2172248543A5022411891 @default.
- W2172248543 hasAuthorship W2172248543A5054867796 @default.
- W2172248543 hasAuthorship W2172248543A5079384895 @default.
- W2172248543 hasAuthorship W2172248543A5085914124 @default.
- W2172248543 hasConcept C121332964 @default.
- W2172248543 hasConcept C136525101 @default.
- W2172248543 hasConcept C142724271 @default.
- W2172248543 hasConcept C171250308 @default.
- W2172248543 hasConcept C19067145 @default.
- W2172248543 hasConcept C191897082 @default.
- W2172248543 hasConcept C192562407 @default.
- W2172248543 hasConcept C204787440 @default.
- W2172248543 hasConcept C2777855556 @default.
- W2172248543 hasConcept C2779227376 @default.
- W2172248543 hasConcept C49040817 @default.
- W2172248543 hasConcept C62520636 @default.
- W2172248543 hasConcept C69544855 @default.
- W2172248543 hasConcept C71924100 @default.
- W2172248543 hasConcept C82706917 @default.
- W2172248543 hasConcept C87359718 @default.
- W2172248543 hasConceptScore W2172248543C121332964 @default.
- W2172248543 hasConceptScore W2172248543C136525101 @default.
- W2172248543 hasConceptScore W2172248543C142724271 @default.
- W2172248543 hasConceptScore W2172248543C171250308 @default.
- W2172248543 hasConceptScore W2172248543C19067145 @default.
- W2172248543 hasConceptScore W2172248543C191897082 @default.
- W2172248543 hasConceptScore W2172248543C192562407 @default.
- W2172248543 hasConceptScore W2172248543C204787440 @default.
- W2172248543 hasConceptScore W2172248543C2777855556 @default.
- W2172248543 hasConceptScore W2172248543C2779227376 @default.
- W2172248543 hasConceptScore W2172248543C49040817 @default.
- W2172248543 hasConceptScore W2172248543C62520636 @default.
- W2172248543 hasConceptScore W2172248543C69544855 @default.
- W2172248543 hasConceptScore W2172248543C71924100 @default.
- W2172248543 hasConceptScore W2172248543C82706917 @default.
- W2172248543 hasConceptScore W2172248543C87359718 @default.
- W2172248543 hasLocation W21722485431 @default.
- W2172248543 hasOpenAccess W2172248543 @default.
- W2172248543 hasPrimaryLocation W21722485431 @default.
- W2172248543 hasRelatedWork W1785278552 @default.
- W2172248543 hasRelatedWork W1965104822 @default.
- W2172248543 hasRelatedWork W1975915865 @default.
- W2172248543 hasRelatedWork W2000851034 @default.
- W2172248543 hasRelatedWork W2002578366 @default.
- W2172248543 hasRelatedWork W2018301351 @default.
- W2172248543 hasRelatedWork W2028701892 @default.
- W2172248543 hasRelatedWork W2048363062 @default.
- W2172248543 hasRelatedWork W2065999457 @default.
- W2172248543 hasRelatedWork W2086905949 @default.
- W2172248543 hasRelatedWork W2089316334 @default.
- W2172248543 hasRelatedWork W2094639414 @default.
- W2172248543 hasRelatedWork W2109515598 @default.
- W2172248543 hasRelatedWork W2514071719 @default.
- W2172248543 hasRelatedWork W2603997878 @default.
- W2172248543 hasRelatedWork W2901043947 @default.
- W2172248543 hasRelatedWork W2907020778 @default.
- W2172248543 hasRelatedWork W2914772123 @default.
- W2172248543 hasRelatedWork W3151139258 @default.
- W2172248543 hasRelatedWork W3198085042 @default.
- W2172248543 isParatext "false" @default.
- W2172248543 isRetracted "false" @default.
- W2172248543 magId "2172248543" @default.
- W2172248543 workType "article" @default.