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- W2176014797 abstract "A novel nanopositioning stage was designed according to the scanning property of SPM with flexure hinge as kinematic structure and piezoelectric ceramic as actuator. Kinetic precision and X directional area of nanopositioner are 1.55nm and 26.4 micron, respectively, which is demonstrated by kinetic analysis and finite element method FEM simulation. Designed nanopositioner based on SPM moves at 3 dimensions with nanometer scale and its motion of X, Y, and Z directions is decoupled and isotropic. Furthermore, frame of nanopositioner is simple and manufacturing is convenient, which will have broad prospect in the field of nanopositioning and nanotracing." @default.
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- W2176014797 date "2006-01-26" @default.
- W2176014797 modified "2023-09-23" @default.
- W2176014797 title "Design research of nanopositioner based on SPM and its simulation of FEM" @default.
- W2176014797 doi "https://doi.org/10.1117/12.667854" @default.
- W2176014797 hasPublicationYear "2006" @default.
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