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- W218006368 abstract "Ultra thin organic films of 2–10 nanometer thichness were deposited by plasma polymerization. A capacitively coupled RF discharge at 13.56 MHz was initiated in a short residence time box–type reacor in an uniform flow of acetylene/argon mixture. The gas knetic residence time in a plasma zone was limited in a range of 5–70 ms to decrease a synthesis of heavy gas phase products and to supress a particulate formation. The film surface topography was studied by an atomic force microscope which shows the films are smooth and pinhole free. A mechanical patterning of deposited films was done by the modified AFM." @default.
- W218006368 created "2016-06-24" @default.
- W218006368 creator A5008240178 @default.
- W218006368 creator A5026596349 @default.
- W218006368 creator A5054455408 @default.
- W218006368 creator A5063022991 @default.
- W218006368 creator A5078563448 @default.
- W218006368 date "1994-01-01" @default.
- W218006368 modified "2023-09-27" @default.
- W218006368 title "Nanometer scale plasma polymerized thin film formation and patterning" @default.
- W218006368 cites W1969380141 @default.
- W218006368 cites W1976106850 @default.
- W218006368 cites W1979427852 @default.
- W218006368 cites W2014850560 @default.
- W218006368 cites W2018164223 @default.
- W218006368 cites W2032808617 @default.
- W218006368 cites W2046350367 @default.
- W218006368 cites W2064508288 @default.
- W218006368 cites W2152605354 @default.
- W218006368 doi "https://doi.org/10.1016/b978-0-444-81889-8.50073-0" @default.
- W218006368 hasPublicationYear "1994" @default.
- W218006368 type Work @default.
- W218006368 sameAs 218006368 @default.
- W218006368 citedByCount "1" @default.
- W218006368 crossrefType "book-chapter" @default.
- W218006368 hasAuthorship W218006368A5008240178 @default.
- W218006368 hasAuthorship W218006368A5026596349 @default.
- W218006368 hasAuthorship W218006368A5054455408 @default.
- W218006368 hasAuthorship W218006368A5063022991 @default.
- W218006368 hasAuthorship W218006368A5078563448 @default.
- W218006368 hasConcept C113196181 @default.
- W218006368 hasConcept C115545448 @default.
- W218006368 hasConcept C121332964 @default.
- W218006368 hasConcept C127413603 @default.
- W218006368 hasConcept C159985019 @default.
- W218006368 hasConcept C171250308 @default.
- W218006368 hasConcept C178790620 @default.
- W218006368 hasConcept C185592680 @default.
- W218006368 hasConcept C187320778 @default.
- W218006368 hasConcept C19067145 @default.
- W218006368 hasConcept C192562407 @default.
- W218006368 hasConcept C2775913793 @default.
- W218006368 hasConcept C43617362 @default.
- W218006368 hasConcept C44228677 @default.
- W218006368 hasConcept C49040817 @default.
- W218006368 hasConcept C521977710 @default.
- W218006368 hasConcept C547737533 @default.
- W218006368 hasConcept C62520636 @default.
- W218006368 hasConcept C77066764 @default.
- W218006368 hasConcept C82706917 @default.
- W218006368 hasConceptScore W218006368C113196181 @default.
- W218006368 hasConceptScore W218006368C115545448 @default.
- W218006368 hasConceptScore W218006368C121332964 @default.
- W218006368 hasConceptScore W218006368C127413603 @default.
- W218006368 hasConceptScore W218006368C159985019 @default.
- W218006368 hasConceptScore W218006368C171250308 @default.
- W218006368 hasConceptScore W218006368C178790620 @default.
- W218006368 hasConceptScore W218006368C185592680 @default.
- W218006368 hasConceptScore W218006368C187320778 @default.
- W218006368 hasConceptScore W218006368C19067145 @default.
- W218006368 hasConceptScore W218006368C192562407 @default.
- W218006368 hasConceptScore W218006368C2775913793 @default.
- W218006368 hasConceptScore W218006368C43617362 @default.
- W218006368 hasConceptScore W218006368C44228677 @default.
- W218006368 hasConceptScore W218006368C49040817 @default.
- W218006368 hasConceptScore W218006368C521977710 @default.
- W218006368 hasConceptScore W218006368C547737533 @default.
- W218006368 hasConceptScore W218006368C62520636 @default.
- W218006368 hasConceptScore W218006368C77066764 @default.
- W218006368 hasConceptScore W218006368C82706917 @default.
- W218006368 hasLocation W2180063681 @default.
- W218006368 hasOpenAccess W218006368 @default.
- W218006368 hasPrimaryLocation W2180063681 @default.
- W218006368 hasRelatedWork W1973803250 @default.
- W218006368 hasRelatedWork W1980756360 @default.
- W218006368 hasRelatedWork W2000373221 @default.
- W218006368 hasRelatedWork W2014467830 @default.
- W218006368 hasRelatedWork W2018631906 @default.
- W218006368 hasRelatedWork W2019020709 @default.
- W218006368 hasRelatedWork W2034922065 @default.
- W218006368 hasRelatedWork W2046479892 @default.
- W218006368 hasRelatedWork W2052044124 @default.
- W218006368 hasRelatedWork W2093232658 @default.
- W218006368 hasRelatedWork W2118799561 @default.
- W218006368 hasRelatedWork W2138923691 @default.
- W218006368 hasRelatedWork W2149647517 @default.
- W218006368 hasRelatedWork W2153560899 @default.
- W218006368 hasRelatedWork W2315842416 @default.
- W218006368 hasRelatedWork W2613605090 @default.
- W218006368 hasRelatedWork W2613914585 @default.
- W218006368 hasRelatedWork W3011161335 @default.
- W218006368 hasRelatedWork W3210911967 @default.
- W218006368 hasRelatedWork W2931912643 @default.
- W218006368 isParatext "false" @default.
- W218006368 isRetracted "false" @default.
- W218006368 magId "218006368" @default.
- W218006368 workType "book-chapter" @default.